Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12282260 | Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask | Yu-Hsin Hsu, Hao-Ming Chang, Sheng-Chang Hsu, Cheng-Ming Lin | 2025-04-22 |
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Ulrich Matejka, Thomas Thaler, Sascha Perlitz +2 more | 2024-02-27 |
| 11774870 | Method for removing a particle from a mask system | Sergey Oshemkov, Joerg Frederik Blumrich, Martin Voelcker, Thomas Scheruebl | 2023-10-03 |
| 11600484 | Cleaning method, semiconductor manufacturing method and a system thereof | Hao-Ming Chang | 2023-03-07 |
| 11307492 | Method for forming photomask and photolithography method | Shih-Ming Chang, Minfeng Chen, Min-An Yang | 2022-04-19 |
| 11209736 | Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask | Yu-Hsin Hsu, Hao-Ming Chang, Sheng-Chang Hsu, Cheng-Ming Lin | 2021-12-28 |
| 10845699 | Method for forming photomask and photolithography method | Shih-Ming Chang, Minfeng Chen, Min-An Yang | 2020-11-24 |
| 10816891 | Photomask and fabrication method therefor | Hao-Ming Chang, Chien-Hung Lai, Cheng-Ming Lin, Hsuan-Wen Wang, Min-An Yang +2 more | 2020-10-27 |
| 10508953 | Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication | Min-An Yang, Hao-Ming Chang, Kuo-Chin Lin, Sheng-Chang Hsu, Li-Chih Lu +1 more | 2019-12-17 |
| 10459332 | Mask blank and fabrication method thereof, and method of fabricating photomask | Hao-Ming Chang, Chih-Ming Chen, Cheng-Ming Lin, Sheng-Chang Hsu, Hsao Shih +1 more | 2019-10-29 |
| 10101651 | Photo mask assembly and optical apparatus including the same | Cheng-Ming Lin, Sheng-Chang Hsu, Yu-Hsin Hsu, Hao-Ming Chang | 2018-10-16 |
| 7223503 | Method for repairing opaque defects on semiconductor mask reticles | Wei-Lian Lin, Chian-Hun Lai, Chi-Kang Chang, Chia-Hsien Chen, Shan-Chan Suc +1 more | 2007-05-29 |