Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914303 | Apparatus and method for characterizing a microlithographic mask | Johannes Ruoff, Heiko Feldmann, Ulrich Matejka, Thomas Thaler, Sascha Perlitz +2 more | 2024-02-27 |
| 11774870 | Method for removing a particle from a mask system | Sergey Oshemkov, Shao-Chi Wei, Martin Voelcker, Thomas Scheruebl | 2023-10-03 |
| 10535132 | Method for determining a distance between a first structure element on a substrate and a second structure element | — | 2020-01-14 |