Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774870 | Method for removing a particle from a mask system | Shao-Chi Wei, Joerg Frederik Blumrich, Martin Voelcker, Thomas Scheruebl | 2023-10-03 |
| 10670955 | Critical dimension variation correction in extreme ultraviolet lithography | Vladimir Kruglyakov, Frederik Blumrich, Yuval Perets | 2020-06-02 |
| 10095101 | Critical dimension variation correction in extreme ultraviolet lithography | Vladimir Kruglyakov, Frederik Blumrich, Yuval Perets | 2018-10-09 |
| 9690191 | Surface defect repair by irradiation | Vladimir Kruglyakov | 2017-06-27 |
| 9034539 | Controllable transmission and phase compensation of transparent material | Ralph Klaesges, Markus Mengel, Vladimir Kruglyakov, Eitan Zait, Vladimir Dmitriev +2 more | 2015-05-19 |
| 8735030 | Method and apparatus for modifying a substrate surface of a photolithographic mask | Ralph Klaesges, Markus Mengel | 2014-05-27 |
| 8101921 | Apparatus and method for inducing controllable jets in liquids | Vladimir Dmitriev, Lev Dvorkin | 2012-01-24 |
| 7736819 | Method for correcting critical dimension variations in photomasks | Eitan Zait, Vladimir Dmitriev, Nikolay Guletsky, Guy Ben-Zvi | 2010-06-15 |
| 7459242 | Method and system for repairing defected photomasks | Eitan Zait, Vladimir Dmitriev, Nikolay N. Guletskiy, Guy Ben-Zvi | 2008-12-02 |
| 6884961 | Intravolume diffractive optical elements | Vladamir Dmitriev, Nikolay Guletsky | 2005-04-26 |
| 6873444 | Volume holograms in transparent materials | Nikolay Guletsky, Vladimir Dmitriev | 2005-03-29 |
| 6566626 | Method and apparatus for generating color images in a transparent medium | Grigory Gaissinsky, Victor Kopelev, Stella Kopelev, Nikolay Guletsky, Vladimir Dmitriev | 2003-05-20 |