Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670955 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Vladimir Kruglyakov, Yuval Perets | 2020-06-02 |
| 10095101 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Vladimir Kruglyakov, Yuval Perets | 2018-10-09 |
| 10055833 | Method and system for EUV mask blank buried defect analysis | Jan Hendrik Peters, Anthony Garetto, Thomas Scherübl, Renzo Capelli | 2018-08-21 |