Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10055833 | Method and system for EUV mask blank buried defect analysis | Jan Hendrik Peters, Frederik Blumrich, Thomas Scherübl, Renzo Capelli | 2018-08-21 |
| 9261775 | Method for analyzing a photomask | Thomas Scheruebl, Gilles Tabbone, Vahagn Sargsyan, Doug Uzzel, Jon Morgan | 2016-02-16 |