Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670955 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Frederik Blumrich, Yuval Perets | 2020-06-02 |
| 10095101 | Critical dimension variation correction in extreme ultraviolet lithography | Sergey Oshemkov, Frederik Blumrich, Yuval Perets | 2018-10-09 |
| 9690191 | Surface defect repair by irradiation | Sergey Oshemkov | 2017-06-27 |
| 9034539 | Controllable transmission and phase compensation of transparent material | Sergey Oshemkov, Ralph Klaesges, Markus Mengel, Eitan Zait, Vladimir Dmitriev +2 more | 2015-05-19 |