Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9034539 | Controllable transmission and phase compensation of transparent material | Sergey Oshemkov, Markus Mengel, Vladimir Kruglyakov, Eitan Zait, Vladimir Dmitriev +2 more | 2015-05-19 |
| 8735030 | Method and apparatus for modifying a substrate surface of a photolithographic mask | Sergey Oshemkov, Markus Mengel | 2014-05-27 |
| 7019824 | Moire method and measuring system for measuring the distortion of an optical imaging system | Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler | 2006-03-28 |