Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8988752 | Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus | Marten Krebs, Gerhard Huber, Joachim Stuehler | 2015-03-24 |
| 8473237 | Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage | Alexander Huebel, Matthias Manger, Gerd Klose, Michael Arnz | 2013-06-25 |
| 8416412 | Method for determination of residual errors | Matthias Manger | 2013-04-09 |
| 8120763 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever, Markus Goeppert +1 more | 2012-02-21 |
| 7408652 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Joachim Stuehler, Helmut Haidner, Albrecht Ehrmann, Martin Schriever +1 more | 2008-08-05 |
| 7400388 | Method for determining distortion and/or image surface | Wolfgang Emer, Manfred Dahl, Rainer Hoch | 2008-07-15 |
| 7119910 | Phase shifting wavefront interference method | — | 2006-10-10 |
| 7019824 | Moire method and measuring system for measuring the distortion of an optical imaging system | Ulrich Wegmann, Ralph Klaesges, Joachim Stuehler | 2006-03-28 |
| 6816247 | Moiré method and a system for measuring the distortion of an optical imaging system | Joachim Heppner, Juergen Massig, Michael Arnz, Michael Kuechel, Juergen Penzing | 2004-11-09 |