Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018918 | Method for adjusting a projection objective | — | 2018-07-10 |
| 9915871 | Method for measuring an angularly resolved intensity distribution and projection exposure apparatus | Dirk Hellweg | 2018-03-13 |
| 9753375 | Illumination optical unit for projection lithography | Axel Scholz, Michael Patra, Frank Schlesener, Manfred Maul, Stefanie Hilt | 2017-09-05 |
| 9715177 | Method for adjusting a projection objective | — | 2017-07-25 |
| 9429495 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Reiner Clement, Ludo Mathijssen | 2016-08-30 |
| 9081294 | Method for measuring an angularly resolved intensity distribution and projection exposure apparatus | Dirk Hellweg | 2015-07-14 |
| 8823948 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Reiner Clement, Ludo Mathijssen | 2014-09-02 |
| 8488127 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Reiner Clement, Ludo Mathijssen | 2013-07-16 |
| 8134716 | Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods | Helmut Haidner, Ulrich Wegmann | 2012-03-13 |
| 7965377 | Method for adjusting a projection objective | — | 2011-06-21 |
| 7796274 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Reiner Clement, Ludo Mathussen | 2010-09-14 |
| 7760366 | System for measuring the image quality of an optical imaging system | Markus Mengel, Ulrich Wegmann, Albrecht Ehrmann, Reiner Clement, Ludo Mathijssen | 2010-07-20 |
| 7436521 | Optical measuring apparatus and operating method for imaging error correction in an optical imaging system | Ulrich Wegmann, Martin Schriever, Rainer Hoch | 2008-10-14 |
| 7417745 | Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry | Helmut Haidner, Rainer Hoch, Ulrich Wegmann, Martin Schriever, Markus Goeppert | 2008-08-26 |
| 7400388 | Method for determining distortion and/or image surface | Uwe Schellhorn, Manfred Dahl, Rainer Hoch | 2008-07-15 |
| 7372545 | Method for adjusting a projection objective | — | 2008-05-13 |
| 7268890 | Device and method for wavefront measurement of an optical imaging system, and a microlithography projection exposure machine | — | 2007-09-11 |
| 7230220 | Method of determining optical properties and projection exposure system comprising a wavefront detection system | Steffen Lauer, Ulrich Wegmann, Harald Sakowski, Martin Schriever | 2007-06-12 |
| 7209241 | Method for determining wavefront aberrations | Paul Graeupner | 2007-04-24 |
| 7019846 | Method for determining wavefront aberrations | Paul Graeupner | 2006-03-28 |