Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11379500 | Automated data integration, reconciliation, and self healing using machine learning | Apoorv Bhargava, Daniel E. Zimmermann, Syed Aleemuddin Noor, Gowthami Agumamidi | 2022-07-05 |
| 10006807 | Apparatus for determining an optical property of an optical imaging system | Albrecht Ehrmann, Helmut Haidner | 2018-06-26 |
| 9482968 | Measuring system | Helmut Haidner, Rolf Freimann, Christoph Striebel | 2016-11-01 |
| 8908192 | Method and apparatus for qualifying optics of a projection exposure tool for microlithography | — | 2014-12-09 |
| 8836929 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Shellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever +1 more | 2014-09-16 |
| 8120763 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever +1 more | 2012-02-21 |
| 7760345 | Method and apparatus for determining at least one optical property of an imaging optical system | Matthias Manger, Gordon Doering, Alfred Gatzweiler | 2010-07-20 |
| 7417745 | Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry | Helmut Haidner, Wolfgang Emer, Rainer Hoch, Ulrich Wegmann, Martin Schriever | 2008-08-26 |
| 7336371 | Apparatus and method for measuring the wavefront of an optical system | Helmut Haidner, Martin Schriever, Ulrich Wegmann | 2008-02-26 |