Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8228483 | Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate | Ulrich Loering, Gerd Reisinger, Franz-Josef Stickel, Sonja Schneider, Johann Trenkler +2 more | 2012-07-24 |
| 7760345 | Method and apparatus for determining at least one optical property of an imaging optical system | Matthias Manger, Markus Goeppert, Alfred Gatzweiler | 2010-07-20 |
| 7301646 | Device and method for the determination of imaging errors and microlithography projection exposure system | Ulrich Wegmann, Helmut Haidner | 2007-11-27 |