Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441970 | Measurement apparatus for measuring a wavefront aberration of an imaging optical system | Albrecht Ehrmann, Michael Samaniego | 2022-09-13 |
| 10324380 | Projection exposure apparatus and method for measuring an imaging aberration | Stig Bieling | 2019-06-18 |
| 10006807 | Apparatus for determining an optical property of an optical imaging system | Albrecht Ehrmann, Markus Goeppert | 2018-06-26 |
| 9494483 | Measuring system for measuring an imaging quality of an EUV lens | Ralf Frese, Michael Samaniego, Markus Deguenther, Rainer Hoch, Martin Schriever | 2016-11-15 |
| 9482968 | Measuring system | Markus Goeppert, Rolf Freimann, Christoph Striebel | 2016-11-01 |
| 8836929 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Shellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever +1 more | 2014-09-16 |
| 8134716 | Methods and apparatus for measuring wavefronts and for determining scattered light, and related devices and manufacturing methods | Wolfgang Emer, Ulrich Wegmann | 2012-03-13 |
| 8120763 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever +1 more | 2012-02-21 |
| 7911624 | Device and method for the interferometric measurement of phase masks | Ulrich Wegmann | 2011-03-22 |
| 7623218 | Method of manufacturing a miniaturized device | Ulrich Wegmann | 2009-11-24 |
| 7417745 | Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry | Wolfgang Emer, Rainer Hoch, Ulrich Wegmann, Martin Schriever, Markus Goeppert | 2008-08-26 |
| 7408652 | Device and method for the optical measurement of an optical system by using an immersion fluid | Ulrich Wegmann, Uwe Schellhorn, Joachim Stuehler, Albrecht Ehrmann, Martin Schriever +1 more | 2008-08-05 |
| 7388696 | Diffuser, wavefront source, wavefront sensor and projection exposure apparatus | Martin Schriever | 2008-06-17 |
| 7336371 | Apparatus and method for measuring the wavefront of an optical system | Markus Goeppert, Martin Schriever, Ulrich Wegmann | 2008-02-26 |
| 7333216 | Apparatus for wavefront detection | Ulrich Wegmann, Martin Schriever | 2008-02-19 |
| 7301646 | Device and method for the determination of imaging errors and microlithography projection exposure system | Ulrich Wegmann, Gordon Doering | 2007-11-27 |
| 7286245 | Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser | Ulrich Wegmann, Michael Hartl, Markus Mengel, Manfred Dahl, Martin Schriever +1 more | 2007-10-23 |
| 7158237 | Interferometric measuring device and projection exposure installation comprising such measuring device | Martin Schriever, Ulrich Wegmann | 2007-01-02 |