Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482968 | Measuring system | Markus Goeppert, Helmut Haidner, Rolf Freimann | 2016-11-01 |
| 7412299 | Process for determining the temperature of a semiconductor wafer in a rapid heating unit | Markus Hauf, Christoph Merkl | 2008-08-12 |
| 7316969 | Method and apparatus for thermally treating substrates | Markus Hauf | 2008-01-08 |
| 7056389 | Method and device for thermal treatment of substrates | Markus Hauf | 2006-06-06 |