Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8335658 | Method and apparatus for determining measurement values | — | 2012-12-18 |
| 8282272 | Calibration substrate and method of calibration therefor | Roland Schanz, Steffen Müller | 2012-10-09 |
| 7412299 | Process for determining the temperature of a semiconductor wafer in a rapid heating unit | Markus Hauf, Christoph Striebel | 2008-08-12 |
| 7169717 | Method of producing a calibration wafer | Markus Hauf, Rolf Bremensdorfer | 2007-01-30 |