Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412758 | Workpiece processing apparatus with thermal processing systems | Dieter Hezler | 2025-09-09 |
| 12399064 | Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures | Markus Lieberer, Paul Janis Timans, Michael X. Yang | 2025-08-26 |
| 12400916 | Transmission-based temperature measurement of a workpiece in a thermal processing system | Michael Storek, Markus Lieberer, Michael X. Yang | 2025-08-26 |
| 12362194 | Rapid thermal processing system with cooling system | Manuel Sohn, Silke Hamm, Dieter Hezler | 2025-07-15 |
| 12352306 | Workpiece support for a thermal processing system | Manuel Sohn, Dieter Hezler | 2025-07-08 |
| 12183558 | Workpiece processing apparatus with thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Pete Lembesis +1 more | 2024-12-31 |
| 12176241 | Support structure for thermal processing systems | Manuel Sohn, Silke Hamm, Alex Wansidler | 2024-12-24 |
| 12120780 | Nitrogen injection for arc lamps | Dave Camm, Pete Lembesis, Joseph Cibere | 2024-10-15 |
| 12119216 | Arc lamp with forming gas for thermal processing systems | Michael X. Yang, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more | 2024-10-15 |
| 12080568 | Support plate for localized heating in thermal processing systems | Johannes Keppler, Michael X. Yang, Thorsten Hülsmann | 2024-09-03 |
| 12068177 | Rapid thermal processing system with cooling system | Manuel Sohn, Silke Hamm, Dieter Hezler | 2024-08-20 |
| 12046489 | Workpiece processing apparatus with thermal processing systems | Dieter Hezler | 2024-07-23 |
| 11955388 | Transmission-based temperature measurement of a workpiece in a thermal processing system | Michael Storek, Markus Lieberer, Michael X. Yang | 2024-04-09 |
| 11837447 | Workpiece processing apparatus with plasma and thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Pete Lembesis +1 more | 2023-12-05 |
| 11812523 | Thermal processing system with transmission switch plate | Michael X. Yang | 2023-11-07 |
| 11721539 | Arc lamp with forming gas for thermal processing systems | Michael X. Yang, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more | 2023-08-08 |
| 11610824 | Transmission-based temperature measurement of a workpiece in a thermal processing system | Michael Storek, Markus Lieberer, Michael X. Yang | 2023-03-21 |
| 11521868 | Support plate for localized heating in thermal processing systems | Johannes Keppler, Michael X. Yang, Thorsten Hülsmann | 2022-12-06 |
| 11193178 | Thermal processing of closed shape workpieces | Johannes Keppler, Michael X. Yang | 2021-12-07 |
| 10966286 | Nitrogen injection for ARC lamps | Dave Camm, Pete Lembesis, Joseph Cibere | 2021-03-30 |
| 7169717 | Method of producing a calibration wafer | Christoph Merkl, Markus Hauf | 2007-01-30 |