Issued Patents All Time
Showing 25 most recent of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399064 | Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures | Rolf Bremensdorfer, Markus Lieberer, Michael X. Yang | 2025-08-26 |
| 11195732 | Low thermal budget annealing | — | 2021-12-07 |
| 11101142 | Pre-heat processes for millisecond anneal system | — | 2021-08-24 |
| 10679864 | Pre-heat processes for millisecond anneal system | — | 2020-06-09 |
| 10262873 | Pre-heat processes for millisecond anneal system | — | 2019-04-16 |
| 10190915 | System and process for calibrating pyrometers in thermal processing chambers | — | 2019-01-29 |
| 9633876 | Selective reflectivity process chamber with customized wavelength response and method | Daniel J. Devine, Young Jai Lee, Yao Zhi Hu, Peter C. Bordiga | 2017-04-25 |
| 8918303 | System and process for calibrating pyrometers in thermal processing chambers | — | 2014-12-23 |
| 8837923 | Pulsed processing semiconductor heating methods using combinations of heating sources | Narasimha Acharya | 2014-09-16 |
| 8696197 | Method and system for determining optical properties of semiconductor wafers | — | 2014-04-15 |
| 8669496 | System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy | — | 2014-03-11 |
| 8668383 | Methods for determining wafer temperature | — | 2014-03-11 |
| 8575521 | Monitoring witness structures for temperature control in RTP systems | Zsolt Nenyei | 2013-11-05 |
| 8557721 | Rapid thermal processing using energy transfer layers | — | 2013-10-15 |
| 8296091 | System and process for calibrating pyrometers in thermal processing chambers | — | 2012-10-23 |
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Bruce W. Peuse, Yaozhi Hu, Guangcai Xing, Wilfried Lerch, Sing-Pin Tay +4 more | 2012-08-07 |
| 8222570 | System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy | — | 2012-07-17 |
| 8157439 | Methods for determining wafer temperature | — | 2012-04-17 |
| 8152365 | Method and system for determining optical properties of semiconductor wafers | — | 2012-04-10 |
| 8138105 | Rapid thermal processing using energy transfer layers | — | 2012-03-20 |
| 8000587 | Pulsed processing semiconductor heating methods and associated system using combinations of heating sources | Narasimha Acharya | 2011-08-16 |
| 7976216 | Determining the temperature of silicon at high temperatures | — | 2011-07-12 |
| 7977258 | Method and system for thermally processing a plurality of wafer-shaped objects | Zsolt Nenyei, Wilfried Lerch, Juergen Niess, Manfred Falter, Patrick Schmid +6 more | 2011-07-12 |
| 7957926 | System and process for calibrating pyrometers in thermal processing chambers | — | 2011-06-07 |
| 7949237 | Heating configuration for use in thermal processing chambers | Zion Koren, Conor Patrick O'Carroll, Shuen Chun Choy, Rudy Santo Tomas Cardema, James Tsuneo Taoka +1 more | 2011-05-24 |