Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Yaozhi Hu, Paul Janis Timans, Guangcai Xing, Wilfried Lerch, Sing-Pin Tay +4 more | 2012-08-07 |
| 6646235 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Karl A. Littau, Yu-Chia Chang | 2003-11-11 |
| 6500266 | Heater temperature uniformity qualification tool | Henry Ho, Alexander M. Rubinchik, Aihua Chen, Abril Cabreros, Steven T. Li +1 more | 2002-12-31 |
| 6423949 | Multi-zone resistive heater | Steven Chen, Henry Ho, Michael Yang, Karl A. Littau, Yu-Chia Chang | 2002-07-23 |
| 6226453 | Temperature probe with fiber optic core | Mark Yam | 2001-05-01 |
| 6179466 | Method and apparatus for measuring substrate temperatures | Gary E. Miner, Mark Yam, Aaron Muir Hunter, Peter A. Knoot, Jason Mershon | 2001-01-30 |
| 5848842 | Method of calibrating a temperature measurement system | Gary E. Miner, Mark Yam | 1998-12-15 |
| 5755511 | Method and apparatus for measuring substrate temperatures | Gary E. Miner, Mark Yam | 1998-05-26 |
| 5660472 | Method and apparatus for measuring substrate temperatures | Gary E. Miner, Mark Yam | 1997-08-26 |
| 5033061 | Laser alignment servo method and apparatus | James L. Hobart, Wayne S. Mefferd | 1991-07-16 |
| 4939739 | Laser alignment servo method and apparatus | James L. Hobart, Wayne S. Mefferd | 1990-07-03 |