Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6991999 | Bi-layer silicon film and method of fabrication | Li Fu, Shulin Wang, Luo Lee, Errol Antonio C. Sanchez | 2006-01-31 |
| 6908499 | Cold trap for CVD furnace | Leon Chia-Liang Lin, Tom Fan, Vito Lee, Yu-Hsiang Wu | 2005-06-21 |
| 6802906 | Emissivity-change-free pumping plate kit in a single wafer chamber | Xiaoliang Jin, Shulin Wang, Lee Luo, Henry Ho | 2004-10-12 |
| 6726955 | Method of controlling the crystal structure of polycrystalline silicon | Shulin Wang, Lee Luo, Errol Antonio C. Sanchez | 2004-04-27 |
| 6645884 | Method of forming a silicon nitride layer on a substrate | Michael Yang, Chien-Teh Kao, Karl A. Littau, Henry Ho, Ying Yu | 2003-11-11 |
| 6646235 | Multi-zone resistive heater | Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2003-11-11 |
| 6586343 | Method and apparatus for directing constituents through a processing chamber | Henry Ho, Ying Yu | 2003-07-01 |
| 6582522 | Emissivity-change-free pumping plate kit in a single wafer chamber | Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Alexander Tam +2 more | 2003-06-24 |
| 6566183 | Method of making a transistor, in particular spacers of the transistor | Lee Luo, Kegang Huang, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen | 2003-05-20 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Xianzhi Tao, Shulin Wang, Lee Luo, Kegang Huang, Sang-Hoon Ahn | 2003-05-06 |
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Shulin Wang, Lee Luo, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more | 2003-05-06 |
| 6530992 | Method of forming a film in a chamber and positioning a substitute in a chamber | Michael Yang, Henry Ho | 2003-03-11 |
| 6479307 | Method of monitoring loss of silicon nitride | Shu-Ya Chuang, Gow-Wei Sun, Ga-Ming Hong, Pei-Jen Wang | 2002-11-12 |
| 6423949 | Multi-zone resistive heater | Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang | 2002-07-23 |
| 6156079 | Window support member for a semiconductor processing system | Henry Ho, Yu-Feng Chang, Kuo-Chun Wu | 2000-12-05 |
| 6110284 | Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber | Chen-An Chen, Henry Ho | 2000-08-29 |
| 6066836 | High temperature resistive heater for a process chamber | Henry Ho, Mei Chang, Ming Xi, Chen-An Chen, Chiliang Chen | 2000-05-23 |
| 5837058 | High temperature susceptor | Ming Xi, Ruiping Wang | 1998-11-17 |
| 5796074 | Wafer heater assembly | Sergio Edelstein, Vijay D. Parkhe | 1998-08-18 |
| 5294374 | Electrical overstress materials and method of manufacture | Henry Martinez, Joann Yastine | 1994-03-15 |