| 6991999 |
Bi-layer silicon film and method of fabrication |
Li Fu, Shulin Wang, Luo Lee, Errol Antonio C. Sanchez |
2006-01-31 |
$13,979,000 |
| 6908499 |
Cold trap for CVD furnace |
Leon Chia-Liang Lin, Tom Fan, Vito Lee, Yu-Hsiang Wu |
2005-06-21 |
$4,295,000 |
| 6802906 |
Emissivity-change-free pumping plate kit in a single wafer chamber |
Xiaoliang Jin, Shulin Wang, Lee Luo, Henry Ho |
2004-10-12 |
$28,243,000 |
| 6726955 |
Method of controlling the crystal structure of polycrystalline silicon |
Shulin Wang, Lee Luo, Errol Antonio C. Sanchez |
2004-04-27 |
$41,702,000 |
| 6645884 |
Method of forming a silicon nitride layer on a substrate |
Michael Yang, Chien-Teh Kao, Karl A. Littau, Henry Ho, Ying Yu |
2003-11-11 |
$43,459,000 |
| 6646235 |
Multi-zone resistive heater |
Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang |
2003-11-11 |
$43,459,000 |
| 6586343 |
Method and apparatus for directing constituents through a processing chamber |
Henry Ho, Ying Yu |
2003-07-01 |
$40,730,000 |
| 6582522 |
Emissivity-change-free pumping plate kit in a single wafer chamber |
Lee Luo, Henry Ho, Shulin Wang, Binh Tran, Alexander Tam +2 more |
2003-06-24 |
$19,441,000 |
| 6566183 |
Method of making a transistor, in particular spacers of the transistor |
Lee Luo, Kegang Huang, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen |
2003-05-20 |
|
| 6559074 |
Method of forming a silicon nitride layer on a substrate |
Xianzhi Tao, Shulin Wang, Lee Luo, Kegang Huang, Sang-Hoon Ahn |
2003-05-06 |
$19,934,000 |
| 6559039 |
Doped silicon deposition process in resistively heated single wafer chamber |
Shulin Wang, Lee Luo, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more |
2003-05-06 |
$19,934,000 |
| 6530992 |
Method of forming a film in a chamber and positioning a substitute in a chamber |
Michael Yang, Henry Ho |
2003-03-11 |
$66,507,000 |
| 6479307 |
Method of monitoring loss of silicon nitride |
Shu-Ya Chuang, Gow-Wei Sun, Ga-Ming Hong, Pei-Jen Wang |
2002-11-12 |
$854,000 |
| 6423949 |
Multi-zone resistive heater |
Henry Ho, Michael Yang, Bruce W. Peuse, Karl A. Littau, Yu-Chia Chang |
2002-07-23 |
$29,082,000 |
| 6156079 |
Window support member for a semiconductor processing system |
Henry Ho, Yu-Feng Chang, Kuo-Chun Wu |
2000-12-05 |
|
| 6110284 |
Apparatus and a method for shielding light emanating from a light source heating a semicondutor processing chamber |
Chen-An Chen, Henry Ho |
2000-08-29 |
$108,791,000 |
| 6066836 |
High temperature resistive heater for a process chamber |
Henry Ho, Mei Chang, Ming Xi, Chen-An Chen, Chiliang Chen |
2000-05-23 |
$144,825,000 |
| 5837058 |
High temperature susceptor |
Ming Xi, Ruiping Wang |
1998-11-17 |
$87,572,000 |
| 5796074 |
Wafer heater assembly |
Sergio Edelstein, Vijay D. Parkhe |
1998-08-18 |
$47,752,000 |
| 5294374 |
Electrical overstress materials and method of manufacture |
Henry Martinez, Joann Yastine |
1994-03-15 |
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