Issued Patents All Time
Showing 25 most recent of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338547 | Method for forming silicon-phosphorous materials | Mark Saly, Schubert S. Chu, Abhishek Dube, Srividya Natarajan | 2025-06-24 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12170196 | Methods and systems for cleaning high aspect ratio structures | Schubert S. Chu | 2024-12-17 |
| 12163229 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2024-12-10 |
| 12091749 | Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Manjunath Subbanna, Ala Moradian +4 more | 2024-09-17 |
| 12018372 | Gas injector for epitaxy and CVD chamber | Tetsuya Ishikawa, Swaminathan Srinivasan, Matthias Bauer, Ala Moradian, Manjunath Subbanna +4 more | 2024-06-25 |
| 12015042 | Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement | Papo CHEN, Schubert S. Chu, John Boland, Zhiyuan Ye, Lori D. Washington +3 more | 2024-06-18 |
| 11901182 | Silicide film nucleation | Xuebin Li, Patricia M. Liu | 2024-02-13 |
| 11860973 | Method and system for foreline deposition diagnostics and control | Ala Moradian, Martin A. Hilkene, Zuoming ZHU, Bindusagar Marath Sankarathodi, Patricia M. Liu +1 more | 2024-01-02 |
| 11821088 | Multi zone spot heating in EPI | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2023-11-21 |
| 11733081 | Methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system | Bindusagar Marath Sankarathodi, Zhiyuan Ye, Jyothi RAJEEVAN, Ala Moradian, Zuoming ZHU +1 more | 2023-08-22 |
| 11649560 | Method for forming silicon-phosphorous materials | Mark Saly, Schubert S. Chu, Abhishek Dube, Srividya Natarajan | 2023-05-16 |
| 11482432 | Method and apparatus for semiconductor processing | — | 2022-10-25 |
| 11411039 | Stacked pixel structure formed using epitaxy | Papo CHEN, John Boland, Schubert S. Chu, Stephen Moffatt | 2022-08-09 |
| 11322649 | Three color light sources integrated on a single wafer | Michael Chudzik | 2022-05-03 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 11145761 | Horizontal gate all around and FinFET device isolation | Shiyu Sun, Naomi Yoshida, Theresa Kramer Guarini, Sung Won Jun, Vanessa Pena +4 more | 2021-10-12 |
| 11081358 | Silicide film nucleation | Xuebin Li, Patricia M. Liu | 2021-08-03 |
| 11037838 | In-situ integrated chambers | Xuebin Li, Schubert S. Chu, Patricia M. Liu, Gaurav Thareja, Raymond Hung | 2021-06-15 |
| 11031241 | Method of growing doped group IV materials | Yi-Chiau Huang | 2021-06-08 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye +3 more | 2021-06-01 |
| 10837121 | Susceptor support | Richard O. Collins, David K. Carlson, Mehmet Tugrul Samir | 2020-11-17 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Nyi O. Myo, Schubert S. Chu | 2020-09-08 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more | 2020-07-28 |
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Nyi O. Myo, Schubert S. Chu, Jeffrey Tobin +1 more | 2019-12-31 |