| 11581408 |
Method and apparatus for selective nitridation process |
Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more |
2023-02-14 |
$35,617,000 |
| 11450509 |
Inductive plasma source with metallic shower head using b-field concentrator |
Canfeng Lai, Peter I. Porshnev, Jose Antonio Marin |
2022-09-20 |
$25,949,000 |
| 10950698 |
Method and apparatus for selective nitridation process |
Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more |
2021-03-16 |
$56,717,000 |
| 10837122 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth |
Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more |
2020-11-17 |
$41,112,000 |
| 10626500 |
Showerhead design |
Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Umesh M. Kelkar, Lara Hawrylchak |
2020-04-21 |
$32,079,000 |
| 10535513 |
Apparatus and methods for backside passivation |
Lara Hawrylchak |
2020-01-14 |
$50,821,000 |
| 10529541 |
Inductive plasma source with metallic shower head using B-field concentrator |
Canfeng Lai, Peter I. Porshnev, Jose Antonio Marin |
2020-01-07 |
$68,481,000 |
| 10519547 |
Susceptor design to eliminate deposition valleys in the wafer |
Karthik Ramanathan, Kartik Shah, Nyi O. Myo, Schubert S. Chu, Errol Antonio C. Sanchez +1 more |
2019-12-31 |
$41,069,000 |
| 10453733 |
Substrate transfer mechanisms |
Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU |
2019-10-22 |
$16,291,000 |
| 10428441 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth |
Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more |
2019-10-01 |
$20,010,000 |
| 10221483 |
Showerhead design |
Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Umesh M. Kelkar, Lara Hawrylchak |
2019-03-05 |
$34,874,000 |
| 10128144 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more |
2018-11-13 |
$24,133,000 |
| 10049881 |
Method and apparatus for selective nitridation process |
Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang +2 more |
2018-08-14 |
$24,993,000 |
| 9929029 |
Substrate carrier system |
— |
2018-03-27 |
$21,583,000 |
| 9905454 |
Substrate transfer mechanisms |
Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU |
2018-02-27 |
$32,297,000 |
| 9683308 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth |
Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more |
2017-06-20 |
$22,588,000 |
| 9659809 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more |
2017-05-23 |
$22,760,000 |
| 9558982 |
Minimal contact edge ring for rapid thermal processing |
Heng Pan, Sairaju Tallavarjula, Kevin Joseph Bautista |
2017-01-31 |
$44,860,000 |
| 9403251 |
Minimal contact edge ring for rapid thermal processing |
Sairaju Tallavarjula, Kevin Joseph Bautista |
2016-08-02 |
$10,698,000 |
| 9385004 |
Support cylinder for thermal processing chamber |
Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more |
2016-07-05 |
$10,411,000 |
| 9048190 |
Methods and apparatus for processing substrates using an ion shield |
Bernard L. Hwang, Canfeng Lai, Lara Hawrylchak, Wei Liu, Johanes F. Swenberg |
2015-06-02 |
$16,225,000 |
| 6613199 |
Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron |
Jean Lu, Thomas W. Mountsier, Hong Mei Zhang |
2003-09-02 |
$64,898,000 |
| 6589398 |
Pasting method for eliminating flaking during nitride sputtering |
Jean Lu, Linda Stenzel, Lananh Pham |
2003-07-08 |
$23,704,000 |
| 6471831 |
Apparatus and method for improving film uniformity in a physical vapor deposition system |
Jean Lu, Tom Yu, Linda Stenzel |
2002-10-29 |
$31,300,000 |
| 6468404 |
Apparatus and method for reducing redeposition in a physical vapor deposition system |
Jean Lu, Tom Yu |
2002-10-22 |
$28,375,000 |
