Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2023-02-14 |
| 11450509 | Inductive plasma source with metallic shower head using b-field concentrator | Canfeng Lai, Peter I. Porshnev, Jose Antonio Marin | 2022-09-20 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2021-03-16 |
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2020-11-17 |
| 10626500 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Umesh M. Kelkar, Lara Hawrylchak | 2020-04-21 |
| 10535513 | Apparatus and methods for backside passivation | Lara Hawrylchak | 2020-01-14 |
| 10529541 | Inductive plasma source with metallic shower head using B-field concentrator | Canfeng Lai, Peter I. Porshnev, Jose Antonio Marin | 2020-01-07 |
| 10519547 | Susceptor design to eliminate deposition valleys in the wafer | Karthik Ramanathan, Kartik Shah, Nyi O. Myo, Schubert S. Chu, Errol Antonio C. Sanchez +1 more | 2019-12-31 |
| 10453733 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU | 2019-10-22 |
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10221483 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Umesh M. Kelkar, Lara Hawrylchak | 2019-03-05 |
| 10128144 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more | 2018-11-13 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang +2 more | 2018-08-14 |
| 9929029 | Substrate carrier system | — | 2018-03-27 |
| 9905454 | Substrate transfer mechanisms | Masato Ishii, Mehmet Tugrul Samir, Shu-Kwan LAU | 2018-02-27 |
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |
| 9659809 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more | 2017-05-23 |
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Sairaju Tallavarjula, Kevin Joseph Bautista | 2017-01-31 |
| 9403251 | Minimal contact edge ring for rapid thermal processing | Sairaju Tallavarjula, Kevin Joseph Bautista | 2016-08-02 |
| 9385004 | Support cylinder for thermal processing chamber | Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jiping Li +1 more | 2016-07-05 |
| 9048190 | Methods and apparatus for processing substrates using an ion shield | Bernard L. Hwang, Canfeng Lai, Lara Hawrylchak, Wei Liu, Johanes F. Swenberg | 2015-06-02 |
| 6613199 | Apparatus and method for physical vapor deposition using an open top hollow cathode magnetron | Jean Lu, Thomas W. Mountsier, Hong Mei Zhang | 2003-09-02 |
| 6589398 | Pasting method for eliminating flaking during nitride sputtering | Jean Lu, Linda Stenzel, Lananh Pham | 2003-07-08 |
| 6471831 | Apparatus and method for improving film uniformity in a physical vapor deposition system | Jean Lu, Tom Yu, Linda Stenzel | 2002-10-29 |
| 6468404 | Apparatus and method for reducing redeposition in a physical vapor deposition system | Jean Lu, Tom Yu | 2002-10-22 |