Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10731272 | Methods and apparatus for deposition processes | Nyi O. Myo, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2020-08-04 |
| 10626500 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak | 2020-04-21 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10260164 | Methods and apparatus for deposition processes | Nyi O. Myo, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2019-04-16 |
| 10221483 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak | 2019-03-05 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9768052 | Minimal contact edge ring for rapid thermal processing | Heng Pan | 2017-09-19 |
| 9650726 | Methods and apparatus for deposition processes | Nyi O. Myo, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2017-05-16 |
| 9558982 | Minimal contact edge ring for rapid thermal processing | Heng Pan, Sairaju Tallavarjula, Jeffrey Tobin | 2017-01-31 |
| 9403251 | Minimal contact edge ring for rapid thermal processing | Sairaju Tallavarjula, Jeffrey Tobin | 2016-08-02 |
| 9217201 | Methods for forming layers on semiconductor substrates | Matthew S. Rogers | 2015-12-22 |
| 9127360 | Epitaxial chamber with cross flow | Balasubramanian Ramachandran, Errol Antonio C. Sanchez, Nyi O. Myo, Harpreet Singh Juneja, Zuoming ZHU | 2015-09-08 |
| D613321 | Liner with recessed panels | Nyi O. Myo | 2010-04-06 |