Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo, Preetham Rao +5 more | 2021-11-09 |
| 10537965 | Fiber array line generator | Samuel C. Howells, Aaron Muir Hunter, Theodore P. Moffitt, Diwakar Kedlaya | 2020-01-21 |
| 10444522 | Customized pupil stop shape for control of edge profile in laser annealing systems | — | 2019-10-15 |
| 10181409 | Thermal processing apparatus | Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2019-01-15 |
| 9927622 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2018-03-27 |
| 9636778 | Optical design for line generation using microlens array | Samuel C. Howells | 2017-05-02 |
| 9395545 | Customized pupil stop shape for control of edge profile in laser annealing systems | — | 2016-07-19 |
| 9285595 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2016-03-15 |
| 9146337 | Apparatus for speckle reduction, pulse stretching, and beam homogenization | Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Theodore P. Moffitt +1 more | 2015-09-29 |
| 8970963 | Multiple beam combiner for laser processing apparatus | Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2015-03-03 |
| 8946594 | Optical design for line generation using microlens array | Samuel C. Howells | 2015-02-03 |
| 8569187 | Thermal processing apparatus | Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more | 2013-10-29 |
| 8026158 | Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window | Kelly J. Bruland, Mark A. Unrath | 2011-09-27 |
| 7888620 | Reducing coherent crosstalk in dual-beam laser processing system | Ho Wai Lo, Philip M. Conklin | 2011-02-15 |
| 6724002 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Marian Mankos, Steven Thomas Coyle, Andres Fernandez, Allan L. Sagle, Paul C. Allen +5 more | 2004-04-20 |
| 6448568 | Electron beam column using high numerical aperture photocathode source illumination | Paul C. Allen, Xiaolan Chen, Samuel C. Howells | 2002-09-10 |