| 11171023 |
Diode laser for wafer heating for EPI processes |
Schubert S. Chu, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo, Preetham Rao +5 more |
2021-11-09 |
$68,627,000 |
| 10537965 |
Fiber array line generator |
Samuel C. Howells, Aaron Muir Hunter, Theodore P. Moffitt, Diwakar Kedlaya |
2020-01-21 |
$34,637,000 |
| 10444522 |
Customized pupil stop shape for control of edge profile in laser annealing systems |
— |
2019-10-15 |
$25,920,000 |
| 10181409 |
Thermal processing apparatus |
Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2019-01-15 |
$61,415,000 |
| 9927622 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2018-03-27 |
$21,583,000 |
| 9636778 |
Optical design for line generation using microlens array |
Samuel C. Howells |
2017-05-02 |
$24,975,000 |
| 9395545 |
Customized pupil stop shape for control of edge profile in laser annealing systems |
— |
2016-07-19 |
$14,320,000 |
| 9285595 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2016-03-15 |
$10,944,000 |
| 9146337 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization |
Jiping Li, Aaron Muir Hunter, Bruce E. Adams, Samuel C. Howells, Theodore P. Moffitt +1 more |
2015-09-29 |
$14,922,000 |
| 8970963 |
Multiple beam combiner for laser processing apparatus |
Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2015-03-03 |
$11,301,000 |
| 8946594 |
Optical design for line generation using microlens array |
Samuel C. Howells |
2015-02-03 |
$26,006,000 |
| 8569187 |
Thermal processing apparatus |
Stephen Moffatt, Samuel C. Howells, Edric Tong, Bruce E. Adams, Jiping Li +1 more |
2013-10-29 |
$9,867,000 |
| 8026158 |
Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window |
Kelly J. Bruland, Mark A. Unrath |
2011-09-27 |
$2,588,000 |
| 7888620 |
Reducing coherent crosstalk in dual-beam laser processing system |
Ho Wai Lo, Philip M. Conklin |
2011-02-15 |
$597,000 |
| 6724002 |
Multiple electron beam lithography system with multiple beam modulated laser illumination |
Marian Mankos, Steven Thomas Coyle, Andres Fernandez, Allan L. Sagle, Paul C. Allen +5 more |
2004-04-20 |
$36,667,000 |
| 6448568 |
Electron beam column using high numerical aperture photocathode source illumination |
Paul C. Allen, Xiaolan Chen, Samuel C. Howells |
2002-09-10 |
$25,752,000 |
