Issued Patents All Time
Showing 1–25 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429520 | Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block | Indranil De, Dennis Ciplickas, Christopher Hess, Jeremy Cheng, Balasubramanian Murugan +1 more | 2025-09-30 |
| 12038476 | Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block | Indranil De, Dennis Ciplickas, Christopher Hess, Jeremy Cheng, Balasubramanian Murugan +1 more | 2024-07-16 |
| 11668746 | Systems, devices, and methods for performing a non-contact electrical measurement on a cell, non-contact electrical measurement cell vehicle, chip, wafer, die, or logic block | Indranil De, Dennis Ciplickas, Christopher Hess, Jeremy Cheng, Balasubramanian Murugan +1 more | 2023-06-06 |
| 11456148 | Aberration reduction in multipass electron microscopy | Mark A. Kasevich, Stewart A. Koppell, Brannon Klopfer, Thomas Juffmann | 2022-09-27 |
| 11340293 | Methods for performing a non-contact electrical measurement on a cell, chip, wafer, die, or logic block | Indranil De, Dennis Ciplickas, Christopher Hess, Jeremy Cheng, Balasubramanian Murugan +1 more | 2022-05-24 |
| 11276549 | Compact arrangement for aberration correction of electron lenses | — | 2022-03-15 |
| 9496119 | E-beam inspection apparatus and method of using the same on various integrated circuit chips | Indranil De, Christopher Hess, Dennis Ciplickas | 2016-11-15 |
| 9406479 | Mirror pulse compressor for electron beam apparatus | — | 2016-08-02 |
| 8729466 | Aberration-corrected and energy-filtered low energy electron microscope with monochromatic dual beam illumination | — | 2014-05-20 |
| 8461526 | Electron beam column and methods of using same | Liqun Han, Xinrong Jiang, Rex Runyon, Carmela Moreno | 2013-06-11 |
| 8334508 | Mirror energy filter for electron beam apparatus | — | 2012-12-18 |
| 8294125 | High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture | Liqun Han, Xinrong Jiang, Rex Runyon, John D. Greene | 2012-10-23 |
| 8258474 | Compact arrangement for dual-beam low energy electron microscope | — | 2012-09-04 |
| 8183526 | Mirror monochromator for charged particle beam apparatus | — | 2012-05-22 |
| 8092927 | Shielding, particulate reducing high vacuum components | Mohammed Tahmassebpur, Salam Harb, Liqun Han | 2012-01-10 |
| 7919193 | Shielding, particulate reducing high vacuum components | Mohammed Tahmassebpur, Salam Harb, Liqun Han | 2011-04-05 |
| 7838832 | Electron beam apparatus and inspection method using dual illumination beams with dynamically controllable offsets | Vassil Spasov | 2010-11-23 |
| 7821187 | Immersion gun equipped electron beam column | Xinrong Jiang, Liqun Han | 2010-10-26 |
| 7816655 | Reflective electron patterning device and method of using same | Harald F. Hess, David L. Adler | 2010-10-19 |
| 7692167 | High-fidelity reflection electron beam lithography | — | 2010-04-06 |
| 7566873 | High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus | David J. Walker, Salam Harb, Vassil Spasov, David G. Stites, Izzy Lewis | 2009-07-28 |
| 7514681 | Electrical process monitoring using mirror-mode electron microscopy | Paul Frank Marella, Mark A. McCord, David L. Adler | 2009-04-07 |
| 7342238 | Systems, control subsystems, and methods for projecting an electron beam onto a specimen | Marek Zywno, Harald F. Hess, Shem-Tov Levi | 2008-03-11 |
| 7217924 | Holey mirror arrangement for dual-energy e-beam inspector | Eric Munro | 2007-05-15 |
| 7205542 | Scanning electron microscope with curved axes | Kurt H. Weiner | 2007-04-17 |