Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9298106 | Wafer stage with reciprocating wafer stage actuation control | Upendra Ummethala, Layton Hale | 2016-03-29 |
| 9141002 | Z-stage with dynamically driven stage mirror and chuck assembly having constraint | Salam Harb, Kent Douglas, James Allen Haslim, Jon Hamilton | 2015-09-22 |
| 8058628 | Substrate processing apparatus and method | Noah Bareket | 2011-11-15 |
| 7897942 | Dynamic tracking of wafer motion and distortion during lithography | Noah Bareket | 2011-03-01 |
| 7633070 | Substrate processing apparatus and method | Noah Bareket | 2009-12-15 |
| 7342238 | Systems, control subsystems, and methods for projecting an electron beam onto a specimen | Marian Mankos, Harald F. Hess, Shem-Tov Levi | 2008-03-11 |
| 6990737 | Fluid bearings and vacuum chucks and methods for producing same | — | 2006-01-31 |
| 6698735 | Fluid bearings and vacuum chucks and methods for producing same | — | 2004-03-02 |
| 6584218 | Automated photomask inspection apparatus | Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme, Michael E. Fein | 2003-06-24 |
| 6516517 | Fluid bearings and vacuum chucks and methods for producing same | — | 2003-02-11 |
| 6390677 | Fluid bearings and vacuum chucks and methods for producing same | — | 2002-05-21 |
| 6363166 | Automated photomask inspection apparatus | Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme, Michael E. Fein | 2002-03-26 |
| 6052478 | Automated photomask inspection apparatus | Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme, Michael E. Fein | 2000-04-18 |
| 5989444 | Fluid bearings and vacuum chucks and methods for producing same | — | 1999-11-23 |
| 5737072 | Automated photomask inspection apparatus and method | David G. Emery, Zain Saidin, Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme +1 more | 1998-04-07 |
| 5572598 | Automated photomask inspection apparatus | Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme, Michael E. Fein | 1996-11-05 |
| 5563702 | Automated photomask inspection apparatus and method | David G. Emery, Zain Saidin, Mark J. Wihl, Tao-Yi Fu, Damon F. Kvamme +1 more | 1996-10-08 |