Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Gildardo Delgado, Francis Chilese, Rudy F. Garcia, Mohammed Tahmassebpur | 2021-03-23 |
| 9879684 | Apparatus and method for shielding a controlled pressure environment | Mohammed Tahmassebpur | 2018-01-30 |
| 9874512 | Method and system for gas flow mitigation of molecular contamination of optics | Gildardo Delgado, Terry Johnson, Marco Arienti, Lennie Klebanoff, Rudy F. Garcia +2 more | 2018-01-23 |
| 9141002 | Z-stage with dynamically driven stage mirror and chuck assembly having constraint | Kent Douglas, Marek Zywno, James Allen Haslim, Jon Hamilton | 2015-09-22 |
| 8664594 | Electron-optical system for high-speed and high-sensitivity inspections | Xinrong Jiang, Liqun Han, Mohammed Tahmassebpur, John D. Greene | 2014-03-04 |
| 8390789 | Z-stage with dynamically driven stage mirror and chuck assembly | Kent Douglas, Marek Zwyno, James Allen Haslim, Jon Hamilton | 2013-03-05 |
| 8169768 | Electrostatic chuck | Mohammed Tahmassebpur | 2012-05-01 |
| 8092927 | Shielding, particulate reducing high vacuum components | Mohammed Tahmassebpur, Liqun Han, Marian Mankos | 2012-01-10 |
| 7919193 | Shielding, particulate reducing high vacuum components | Mohammed Tahmassebpur, Liqun Han, Marian Mankos | 2011-04-05 |
| 7800735 | Z-stage with dynamically driven stage mirror and chuck assembly | Kent Douglas, Marek Zwyno, James Allen Haslim, Jon Hamilton | 2010-09-21 |
| 7566873 | High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus | David J. Walker, Vassil Spasov, David G. Stites, Izzy Lewis, Marian Mankos | 2009-07-28 |