Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158576 | Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems | Michael Lang, Ravichandra Jagannath | 2024-12-03 |
| 11419202 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Frank Chilese, Oleg Khodykin | 2022-08-16 |
| 11343899 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Layton Hale, Oleg Khodykin | 2022-05-24 |
| 11156926 | Vacuum actuator containment for molecular contaminant and particle mitigation | Zefram Marks, Gildardo Delgado, Joseph Walsh, Matthew Bernard McLaughlin Hoffman | 2021-10-26 |
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Gildardo Delgado, Francis Chilese, Mohammed Tahmassebpur, Salam Harb | 2021-03-23 |
| 10893599 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Frank Chilese, Oleg Khodykin | 2021-01-12 |
| 10880979 | Droplet generation for a laser produced plasma light source | Brian Ahr, Alexander N. Bykanov, Layton Hale, Oleg Khodykin | 2020-12-29 |
| 10840055 | System and method for photocathode illumination inspection | Gildardo Delgado, Katerina Ioakeimidi, Frances Hill, Mike Romero, Zefram Marks +1 more | 2020-11-17 |
| 10804069 | Photocathode designs and methods of generating an electron beam using a photocathode | Katerina Ioakeimidi, Gildardo Delgado, Michael E. Romero, Frances Hill | 2020-10-13 |
| 10748737 | Electron beam generation and measurement | Katerina Ioakeimidi, Gildardo Delgado, Frances Hill, Michael E. Romero | 2020-08-18 |
| 10741354 | Photocathode emitter system that generates multiple electron beams | Gildardo Delgado, Katerina Ioakeimidi, Zefram Marks, Gary V. Lopez Lopez, Frances Hill +1 more | 2020-08-11 |
| 10714307 | Neutral atom imaging system | Ilya Bezel, Eugene Shifrin, Gildardo Delgado | 2020-07-14 |
| 10714294 | Metal protective layer for electron emitters with a diffusion barrier | Frances Hill, Gildardo Delgado, Gary V. Lopez Lopez, Michael E. Romero, Katerina Ioakeimidi +1 more | 2020-07-14 |
| 10714295 | Metal encapsulated photocathode electron emitter | Gildardo Delgado, Katerina Ioakeimidi, Frances Hill, Gary V. Lopez Lopez | 2020-07-14 |
| 10607806 | Silicon electron emitter designs | Frances Hill, Gildardo Delgado, Michael E. Romero, Katerina Ioakeimidi | 2020-03-31 |
| 10535493 | Photocathode designs and methods of generating an electron beam using a photocathode | Katerina Ioakeimidi, Gildardo Delgado, Michael E. Romero, Frances Hill | 2020-01-14 |
| 10395884 | Ruthenium encapsulated photocathode electron emitter | Gildardo Delgado, Katerina Ioakeimidi, Frances Hill, Michael E. Romero | 2019-08-27 |
| 10141155 | Electron beam emitters with ruthenium coating | Gildardo Delgado, Edgardo Garcia Berrios, Frances Hill | 2018-11-27 |
| 10021773 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Frank Chilese, Oleg Khodykin | 2018-07-10 |
| 9984846 | High brightness boron-containing electron beam emitters for use in a vacuum environment | William G. Schultz, Gildardo Delgado, Frances Hill, Edgardo Garcia Berrios | 2018-05-29 |
| 9874512 | Method and system for gas flow mitigation of molecular contamination of optics | Gildardo Delgado, Terry Johnson, Marco Arienti, Salam Harb, Lennie Klebanoff +2 more | 2018-01-23 |
| 9810991 | System and method for cleaning EUV optical elements | Frank Chilese, Gildardo Delgado | 2017-11-07 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Layton Hale +3 more | 2017-01-10 |
| 9422978 | Gas bearing assembly for an EUV light source | Francis Chilese | 2016-08-23 |
| 9389180 | Methods and apparatus for use with extreme ultraviolet light having contamination protection | Francis Chilese, John R. Torczynski, Leonard E. Klebanoff, Gildardo Delgado, Daniel J. Rader +2 more | 2016-07-12 |