Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12418972 | Confocal chromatic metrology for EUV source condition monitoring | Patrick Tae, Caijun Su, Ravichandra Jagannath | 2025-09-16 |
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Alexander N. Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher +4 more | 2023-04-25 |
| 11419202 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Rudy F. Garcia, Frank Chilese, Oleg Khodykin | 2022-08-16 |
| 11343899 | Droplet generation for a laser produced plasma light source | Alexander N. Bykanov, Rudy F. Garcia, Layton Hale, Oleg Khodykin | 2022-05-24 |
| 10893599 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Rudy F. Garcia, Frank Chilese, Oleg Khodykin | 2021-01-12 |
| 10880979 | Droplet generation for a laser produced plasma light source | Alexander N. Bykanov, Rudy F. Garcia, Layton Hale, Oleg Khodykin | 2020-12-29 |
| 10261911 | Apparatus and method for computational workflow management | Jonathan Z. Gehman, Khadir A. Griffith, Gary L. Jackson, William J. La Cholter, Anthony J. Castellani | 2019-04-16 |
| 10021773 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Rudy F. Garcia, Frank Chilese, Oleg Khodykin | 2018-07-10 |
| 9544984 | System and method for generation of extreme ultraviolet light | Alexander N. Bykanov, Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Layton Hale +3 more | 2017-01-10 |