| 12418972 |
Confocal chromatic metrology for EUV source condition monitoring |
Patrick Tae, Caijun Su, Ravichandra Jagannath |
2025-09-16 |
| 11635700 |
Method and apparatus for EUV mask inspection |
Erel Milshtein, Alexander N. Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher +4 more |
2023-04-25 |
| 11419202 |
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element |
Alexey Kuritsyn, Rudy F. Garcia, Frank Chilese, Oleg Khodykin |
2022-08-16 |
| 11343899 |
Droplet generation for a laser produced plasma light source |
Alexander N. Bykanov, Rudy F. Garcia, Layton Hale, Oleg Khodykin |
2022-05-24 |
| 10893599 |
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element |
Alexey Kuritsyn, Rudy F. Garcia, Frank Chilese, Oleg Khodykin |
2021-01-12 |
| 10880979 |
Droplet generation for a laser produced plasma light source |
Alexander N. Bykanov, Rudy F. Garcia, Layton Hale, Oleg Khodykin |
2020-12-29 |
| 10261911 |
Apparatus and method for computational workflow management |
Jonathan Z. Gehman, Khadir A. Griffith, Gary L. Jackson, William J. La Cholter, Anthony J. Castellani |
2019-04-16 |
| 10021773 |
Laser produced plasma light source having a target material coated on a cylindrically-symmetric element |
Alexey Kuritsyn, Rudy F. Garcia, Frank Chilese, Oleg Khodykin |
2018-07-10 |
| 9544984 |
System and method for generation of extreme ultraviolet light |
Alexander N. Bykanov, Oleg Khodykin, Daniel Wack, Konstantin Tsigutkin, Layton Hale +3 more |
2017-01-10 |
