Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12418972 | Confocal chromatic metrology for EUV source condition monitoring | Patrick Tae, Caijun Su, Brian Ahr | 2025-09-16 |
| 12158576 | Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems | Rudy F. Garcia, Michael Lang | 2024-12-03 |