Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12432461 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more | 2025-09-30 |
| 12418972 | Confocal chromatic metrology for EUV source condition monitoring | Caijun Su, Ravichandra Jagannath, Brian Ahr | 2025-09-16 |
| 12163911 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Leonard Tedeschi, Michael D. Willwerth, Daniel T. McCormick | 2024-12-10 |
| 12123090 | Differential capacitive sensor for in-situ film thickness and dielectric constant measurement | Yaoling Pan, Leonard Tedeschi | 2024-10-22 |
| 12114083 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more | 2024-10-08 |
| 12031910 | Transmission corrected plasma emission using in-situ optical reflectometry | Zhaozhao Zhu, Blake Erickson, Chunlei Zhang | 2024-07-09 |
| 12009191 | Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall | Blake Erickson, Zhaozhao Zhu, Michael D. Willwerth, Barry Craver | 2024-06-11 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun, Philip Allan Kraus +5 more | 2024-06-11 |
| 12000041 | Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner | — | 2024-06-04 |
| 11781214 | Differential capacitive sensors for in-situ film thickness and dielectric constant measurement | Yaoling Pan, Leonard Tedeschi | 2023-10-10 |
| 11736818 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more | 2023-08-22 |
| 11708635 | Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner | — | 2023-07-25 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus, Xiaopu Li +6 more | 2023-02-14 |
| 11551905 | Resonant process monitor | Yaoling Pan, Vijaykumar Krithivasan, Shimin Mao, Kelvin Chan, Michael D. Willwerth +5 more | 2023-01-10 |
| 11545346 | Capacitive sensing data integration for plasma chamber condition monitoring | Yaoling Pan, Michael D. Willwerth, Leonard Tedeschi, Kiyki-Shiy Shang, Mikhail Taraboukhine +2 more | 2023-01-03 |
| 11415538 | Capacitive sensor housing for chamber condition monitoring | Yaoling Pan, Leonard Tedeschi, Michael D. Willwerth, Daniel T. McCormick | 2022-08-16 |
| 11284018 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more | 2022-03-22 |