Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354847 | Methods and apparatus for conductance liners in semiconductor process chambers | Timothy Joseph Franklin, Rajinder Dhindsa, Carlaton WONG | 2025-07-08 |
| 12255051 | Multi-shape voltage pulse trains for uniformity and etch profile tuning | Linying Cui, James Rogers, Rajinder Dhindsa, Keith HERNANDEZ | 2025-03-18 |
| D1066275 | Baffle for anti-rotation process kit for substrate processing chamber | Rohan Rane, Xue Yang Chang, Timothy Joseph Franklin | 2025-03-11 |
| 12237148 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +4 more | 2025-02-25 |
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Rohan Rane, Xue Yang Chang, Timothy Joseph Franklin | 2024-10-29 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Philip Allan Kraus +5 more | 2024-06-11 |
| 11894255 | Sheath and temperature control of process kit | Jaeyong Cho, Kartik Ramaswamy | 2024-02-06 |
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +3 more | 2023-12-19 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +4 more | 2023-10-03 |
| 11764041 | Adjustable thermal break in a substrate support | Alvaro Garcia de Gorordo, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-09-19 |
| 11462388 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +4 more | 2022-10-04 |
| 11462389 | Pulsed-voltage hardware assembly for use in a plasma processing system | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +5 more | 2022-10-04 |
| 10975469 | Plasma resistant coating of porous body by atomic layer deposition | Vahid Firouzdor, Sumanth Banda, Rajinder Dhindsa, Dana Marie Lovell | 2021-04-13 |
| 10745805 | Plasma resistant coating of porous body by atomic layer deposition | Vahid Firouzdor, Sumanth Banda, Rajinder Dhindsa, Dana Marie Lovell | 2020-08-18 |
| 8797705 | Methods and arrangement for plasma dechuck optimization based on coupling of plasma signaling to substrate position and potential | John C. Valcore, Jr., Saurabh Ullal, Ed Santos, Konstantin Makhratchev | 2014-08-05 |