| 12354847 |
Methods and apparatus for conductance liners in semiconductor process chambers |
Timothy Joseph Franklin, Rajinder Dhindsa, Daniel Sang Byun |
2025-07-08 |
| 12278089 |
Plasma uniformity control system and methods |
Michael Stearns, Kartik Ramaswamy |
2025-04-15 |
| 12211734 |
Lift pin mechanism |
Alexander SULYMAN, Rajinder Dhindsa, Timothy Joseph Franklin, Steven E. Babayan, Anwar Husain +2 more |
2025-01-28 |
| 12068137 |
Thread profiles for semiconductor process chamber components |
Reyn Tetsuro WAKABAYASHI, Timothy Joseph Franklin |
2024-08-20 |
| 12020977 |
Lift pin assembly |
Alexander SULYMAN, Anwar Husain, Timothy Joseph Franklin, Xue Yang Chang |
2024-06-25 |
| 11699571 |
Semiconductor processing chambers for deposition and etch |
Khokan Chandra Paul, Ravikumar Patil, Vijet Patil, Adam J. Fischbach, Timothy Franklin +2 more |
2023-07-11 |
| 11560626 |
Substrate processing chamber |
Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna +2 more |
2023-01-24 |
| D946534 |
Radio frequency conduit |
Adam J. Fischbach, Kien N. Chuc, Canfeng Lai |
2022-03-22 |
