Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354847 | Methods and apparatus for conductance liners in semiconductor process chambers | Rajinder Dhindsa, Daniel Sang Byun, Carlaton WONG | 2025-07-08 |
| 12341048 | Porous plug for electrostatic chuck gas delivery | Alexander SULYMAN, Xue Yang Chang, Anwar Husain, Joseph F. Sommers | 2025-06-24 |
| D1066275 | Baffle for anti-rotation process kit for substrate processing chamber | Rohan Rane, Xue Yang Chang, Daniel Sang Byun | 2025-03-11 |
| 12221694 | Conditioning of a processing chamber | Pramit Manna, Swaminathan Srinivasan | 2025-02-11 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Steven E. Babayan, Anwar Husain +2 more | 2025-01-28 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph F. Sommers, Joseph Behnke, Xue Yang Chang, Anwar Husain, Alexander SULYMAN +1 more | 2025-01-14 |
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Rohan Rane, Xue Yang Chang, Daniel Sang Byun | 2024-10-29 |
| 12068137 | Thread profiles for semiconductor process chamber components | Reyn Tetsuro WAKABAYASHI, Carlaton WONG | 2024-08-20 |
| 12030135 | Methods to fabricate chamber component holes using laser drilling | Sumit Agarwal | 2024-07-09 |
| 12020977 | Lift pin assembly | Alexander SULYMAN, Anwar Husain, Carlaton WONG, Xue Yang Chang | 2024-06-25 |
| 11959174 | Shunt door for magnets in plasma process chamber | Kallol Bera, Sathya Swaroop Ganta, Kaushik Alayavalli, Akshay Dhanakshirur, Stephen C. Garner +1 more | 2024-04-16 |
| 11819948 | Methods to fabricate chamber component holes using laser drilling | Sumit Agarwal, Joseph F. Sommers | 2023-11-21 |
| 11587764 | Magnetic housing systems | Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Pramit Manna, Eswaranand Venkatasubramanian +3 more | 2023-02-21 |
| 11560626 | Substrate processing chamber | Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna, Carlaton WONG +2 more | 2023-01-24 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian, Edward Haywood +2 more | 2023-01-17 |
| 11508558 | Thermal repeatability and in-situ showerhead temperature monitoring | Steven E. Babayan, Philip Allan Kraus | 2022-11-22 |
| 11270905 | Modulating film properties by optimizing plasma coupling materials | Eswaranand Venkatasubramanian, Edward Haywood, Samuel E. Gottheim, Pramit Manna, Kien N. Chuc +2 more | 2022-03-08 |
| 11257698 | Selective etch rate monitor | Philip Allan Kraus | 2022-02-22 |
| 11189517 | RF electrostatic chuck filter circuit | Zheng John Ye, Edward Haywood, Adam J. Fischbach | 2021-11-30 |
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, David Blahnik +1 more | 2020-12-01 |
| 10790175 | Selective etch rate monitor | Philip Allan Kraus | 2020-09-29 |
| 10607817 | Thermal repeatability and in-situ showerhead temperature monitoring | Steven E. Babayan, Philip Allan Kraus | 2020-03-31 |
| 9978621 | Selective etch rate monitor | Philip Allan Kraus | 2018-05-22 |
| 9318306 | Interchangeable sputter gun head | Owen Ho Yin Fong, Stephen C. Garner, James Tsung | 2016-04-19 |
| 8975166 | Method and apparatus for atomic hydrogen surface treatment during GaN epitaxy | Thai Cheng Chua, Philip Allan Kraus | 2015-03-10 |