Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340984 | Radio frequency power return path | Luke Bonecutter, Tuan Nguyen, Amit Kumar BANSAL | 2025-06-24 |
| 12279359 | Linear accelerator assembly including flexible high-voltage connection | Charles T. Carlson, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2025-04-15 |
| 12249522 | Processing chamber with annealing mini-environment | Michael Honan, Robert Brent Vopat, Jeffrey Blahnik, Charles T. Carlson | 2025-03-11 |
| 12183553 | Baffle implementation for improving bottom purge gas flow uniformity | Nitin Pathak, Kartik Shah, Amit Kumar BANSAL, Tuan Nguyen, Juan Carlos Rocha | 2024-12-31 |
| 12144101 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | Costel Biloiu, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair | 2024-11-12 |
| 11948817 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller, Luke Bonecutter | 2024-04-02 |
| 11895766 | Linear accelerator assembly including flexible high-voltage connection | Charles T. Carlson, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior | 2024-02-06 |
| 11856685 | Stiffened RF LINAC coil inductor with internal support structure | Charles T. Carlson, Aaron P. Webb, Paul J. Murphy, Frank Sinclair | 2023-12-26 |
| 11812539 | Resonator, linear accelerator configuration and ion implantation system having rotating exciter | Costel Biloiu, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair | 2023-11-07 |
| 11791176 | Processing chamber with annealing mini-environment | Michael Honan, Robert Brent Vopat, Jeffrey Blahnik, Charles T. Carlson | 2023-10-17 |
| 11710617 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, Robert Brent Vopat, Charles T. Carlson, Frank Sinclair +1 more | 2023-07-25 |
| 11596051 | Resonator, linear accelerator configuration and ion implantation system having toroidal resonator | Costel Biloiu, Charles T. Carlson, Frank Sinclair, Paul J. Murphy | 2023-02-28 |
| 11476135 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller, Luke Bonecutter | 2022-10-18 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, Tejas Ulavi, Amit Kumar BANSAL +3 more | 2022-09-06 |
| 11404297 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, Paul B. Reuter | 2022-08-02 |
| 11388810 | System, apparatus and method for multi-frequency resonator operation in linear accelerator | Peter F. Kurunczi, Frank Sinclair | 2022-07-12 |
| 11355367 | Robot for simultaneous substrate transfer | Jason M. Schaller, Charles T. Carlson, Luke Bonecutter, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more | 2022-06-07 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |
| 11171029 | Electronic device manufacturing load port apparatus, systems, and methods | Paul B. Reuter, Luke Bonecutter, Douglas B. Baumgarten | 2021-11-09 |
| 11094504 | Resonator coil having an asymmetrical profile | Costel Biloiu, Michael Honan, Robert Brent Vopat, Charles T. Carlson, Frank Sinclair +1 more | 2021-08-17 |
| 11078568 | Pumping apparatus and method for substrate processing chambers | Kalyanjit Ghosh, Amit Kumar BANSAL, Tuan Nguyen | 2021-08-03 |
| 10854483 | High pressure steam anneal processing apparatus | Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin +1 more | 2020-12-01 |
| 10832928 | Systems, apparatus, and methods for an improved load port | Luke Bonecutter, Paul B. Reuter | 2020-11-10 |
| 10741432 | Systems, apparatus, and methods for a load port door opener | — | 2020-08-11 |