| 12340984 |
Radio frequency power return path |
Luke Bonecutter, Tuan Nguyen, Amit Kumar BANSAL |
2025-06-24 |
|
| 12279359 |
Linear accelerator assembly including flexible high-voltage connection |
Charles T. Carlson, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior |
2025-04-15 |
|
| 12249522 |
Processing chamber with annealing mini-environment |
Michael Honan, Robert Brent Vopat, Jeffrey Blahnik, Charles T. Carlson |
2025-03-11 |
|
| 12183553 |
Baffle implementation for improving bottom purge gas flow uniformity |
Nitin Pathak, Kartik Shah, Amit Kumar BANSAL, Tuan Nguyen, Juan Carlos Rocha |
2024-12-31 |
$49,330,000 |
| 12144101 |
Resonator, linear accelerator configuration and ion implantation system having rotating exciter |
Costel Biloiu, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair |
2024-11-12 |
$39,712,000 |
| 11948817 |
Robot for simultaneous substrate transfer |
Charles T. Carlson, Jason M. Schaller, Luke Bonecutter |
2024-04-02 |
$42,223,000 |
| 11895766 |
Linear accelerator assembly including flexible high-voltage connection |
Charles T. Carlson, Robert Brent Vopat, Frank Sinclair, Paul J. Murphy, Krag R. Senior |
2024-02-06 |
$39,056,000 |
| 11856685 |
Stiffened RF LINAC coil inductor with internal support structure |
Charles T. Carlson, Aaron P. Webb, Paul J. Murphy, Frank Sinclair |
2023-12-26 |
$30,871,000 |
| 11812539 |
Resonator, linear accelerator configuration and ion implantation system having rotating exciter |
Costel Biloiu, Wai-Ming Tam, Charles T. Carlson, Frank Sinclair |
2023-11-07 |
$37,048,000 |
| 11791176 |
Processing chamber with annealing mini-environment |
Michael Honan, Robert Brent Vopat, Jeffrey Blahnik, Charles T. Carlson |
2023-10-17 |
$42,568,000 |
| 11710617 |
Resonator coil having an asymmetrical profile |
Costel Biloiu, Michael Honan, Robert Brent Vopat, Charles T. Carlson, Frank Sinclair +1 more |
2023-07-25 |
$93,796,000 |
| 11596051 |
Resonator, linear accelerator configuration and ion implantation system having toroidal resonator |
Costel Biloiu, Charles T. Carlson, Frank Sinclair, Paul J. Murphy |
2023-02-28 |
$49,197,000 |
| 11476135 |
Robot for simultaneous substrate transfer |
Charles T. Carlson, Jason M. Schaller, Luke Bonecutter |
2022-10-18 |
$26,737,000 |
| 11434569 |
Ground path systems for providing a shorter and symmetrical ground path |
Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, Tejas Ulavi, Amit Kumar BANSAL +3 more |
2022-09-06 |
$39,364,000 |
| 11404297 |
Systems, apparatus, and methods for an improved load port |
Luke Bonecutter, Paul B. Reuter |
2022-08-02 |
$46,822,000 |
| 11388810 |
System, apparatus and method for multi-frequency resonator operation in linear accelerator |
Peter F. Kurunczi, Frank Sinclair |
2022-07-12 |
$30,931,000 |
| 11355367 |
Robot for simultaneous substrate transfer |
Jason M. Schaller, Charles T. Carlson, Luke Bonecutter, Karuppasamy Muthukamatchi, Jeff Hudgens +1 more |
2022-06-07 |
$46,649,000 |
| 11315806 |
Batch heating and cooling chamber or loadlock |
Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, William T. Weaver |
2022-04-26 |
$43,127,000 |
| 11264258 |
Buffer chamber wafer heating mechanism and supporting robots |
William T. Weaver, Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, Paul E. Pergande |
2022-03-01 |
$41,046,000 |
| 11171029 |
Electronic device manufacturing load port apparatus, systems, and methods |
Paul B. Reuter, Luke Bonecutter, Douglas B. Baumgarten |
2021-11-09 |
$68,627,000 |
| 11094504 |
Resonator coil having an asymmetrical profile |
Costel Biloiu, Michael Honan, Robert Brent Vopat, Charles T. Carlson, Frank Sinclair +1 more |
2021-08-17 |
$63,158,000 |
| 11078568 |
Pumping apparatus and method for substrate processing chambers |
Kalyanjit Ghosh, Amit Kumar BANSAL, Tuan Nguyen |
2021-08-03 |
$89,613,000 |
| 10854483 |
High pressure steam anneal processing apparatus |
Jason M. Schaller, Robert Brent Vopat, Charles T. Carlson, Jeffrey Blahnik, Timothy Joseph Franklin +1 more |
2020-12-01 |
$39,153,000 |
| 10832928 |
Systems, apparatus, and methods for an improved load port |
Luke Bonecutter, Paul B. Reuter |
2020-11-10 |
$91,344,000 |
| 10741432 |
Systems, apparatus, and methods for a load port door opener |
— |
2020-08-11 |
$71,596,000 |
