Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415463 | Contactless workpiece temperature sensor | — | 2022-08-16 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon | 2022-03-01 |
| 11109452 | Modular LED heater | — | 2021-08-31 |
| 10903096 | System and apparatus for process chamber window cooling | James D. Strassner | 2021-01-26 |
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon | 2020-06-30 |
| 10669430 | Anti-reflective coating for transparent end effectors | — | 2020-06-02 |
| 10600662 | Silicon carbide substrate heating | — | 2020-03-24 |
| 10283379 | Batch LED heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Benjamin B. Riordon, David Blahnik, William T. Weaver | 2019-05-07 |
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | William T. Weaver, Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon | 2018-10-16 |
| 9995631 | System and method to monitor semiconductor workpiece temperature using thermal imaging | Gary Wyka, Aaron P. Webb | 2018-06-12 |
| 9862101 | Self-damping end effector | Jack J. LoPiccolo | 2018-01-09 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, William T. Weaver, Morgan Evans, Robert Brent Vopat, Julian G. Blake +2 more | 2017-08-08 |
| 9415519 | Composite end effector and method of making a composite end effector | Paul Forderhase | 2016-08-16 |
| 9412638 | End effector pads | Charles T. Carlson, Krag R. Senior | 2016-08-09 |
| 9061423 | Wafer handling apparatus | — | 2015-06-23 |
| 9004564 | Wafer handling apparatus | Charles T. Carlson | 2015-04-14 |
| 8845138 | Light fixture with multiple LEDs and synthetic jet thermal management system | John Stanley Booth, Raghavendran Mahalingam, Lee M. Jones, Daniel N. Grimm | 2014-09-30 |
| 8066410 | Light fixture with multiple LEDs and synthetic jet thermal management system | John Stanley Booth, Raghavendran Mahalingam, Lee M. Jones, Daniel N. Grimm | 2011-11-29 |
| D505443 | Photographic media developer cartridge | Homero Saldana, Kosta S. Selinidis, Paul N. Winberg | 2005-05-24 |
| 6470954 | Method of spray forming readily weldable and machinable metal deposits | Jeffrey Alan Kinane, David Robert Collins, Matthew John Zaluzec, Grigoriy Grinberg | 2002-10-29 |
| 6331680 | Multilayer electrical interconnection device and method of making same | David J. Klassen, Morgan Whitney, Thomas Randall Peterman, David Robert Collins | 2001-12-18 |
| 6308765 | Method of making tools having a core die and a cavity die | Grigoriy Grinberg, David Robert Collins, Jeffrey Alan Kinane | 2001-10-30 |
| 6298900 | Method of integrating wear plates into a spray formed rapid tool | Jeffrey Alan Kinane, David Robert Collins, Jim Welniak | 2001-10-09 |
| 6297466 | Method for repairing steel spray-formed tooling with TIG welding process | Nakhleh Hussary | 2001-10-02 |