| 12315748 |
Workpiece handling architecture for high workpiece throughput |
Jason M. Schaller, Michael Mason Carrell, Charles T. Carlson |
2025-05-27 |
|
| 12315747 |
Workpiece handling architecture for high workpiece throughput |
Jason M. Schaller, Michael Mason Carrell, Charles T. Carlson |
2025-05-27 |
|
| 12002649 |
Spinning disk with electrostatic clamped platens for ion implantation |
Robert J. Mitchell, Frank Sinclair, Joseph C. Olson, Nick Parisi |
2024-06-04 |
$68,807,000 |
| 11894251 |
Transport system |
Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more |
2024-02-06 |
$39,056,000 |
| 11817332 |
Multi-wafer volume single transfer chamber facet |
Andrew J. Constant, Shay Assaf, Jacob Newman |
2023-11-14 |
$33,075,000 |
| 11315806 |
Batch heating and cooling chamber or loadlock |
Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik |
2022-04-26 |
$43,127,000 |
| 11264258 |
Buffer chamber wafer heating mechanism and supporting robots |
Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande |
2022-03-01 |
$41,046,000 |
| 11232965 |
Transport system |
Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more |
2022-01-25 |
$92,631,000 |
| 10854491 |
Dynamic leveling process heater lift |
Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, Gregory John Freeman, Robert Brent Vopat |
2020-12-01 |
$39,153,000 |
| 10818525 |
Ambient controlled transfer module and process system |
Shay Assaf, Andrew J. Constant, Jacob Newman, Charles T. Carlson, Stephen C. Hickerson |
2020-10-27 |
$26,711,000 |
| 10699930 |
Buffer chamber wafer heating mechanism and supporting robots |
Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande |
2020-06-30 |
$26,020,000 |
| 10597779 |
Susceptor position and rational apparatus and methods of use |
Robert Brent Vopat, Joseph Yudovsky, Jason M. Schaller |
2020-03-24 |
$19,108,000 |
| 10586720 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2020-03-10 |
$33,694,000 |
| 10443934 |
Substrate handling and heating system |
Morgan Evans, Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian, Robert Brent Vopat |
2019-10-15 |
|
| 10446710 |
Transfer chamber and method of using a transfer chamber |
Aaron P. Webb, Charles T. Carlson, Paul Forderhase, Robert Brent Vopat |
2019-10-15 |
|
| 10427303 |
Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more |
2019-10-01 |
$20,010,000 |
| 10361104 |
Ambient controlled transfer module and process system |
Shay Assaf, Andrew J. Constant, Jacob Newman, Charles T. Carlson, Stephen C. Hickerson |
2019-07-23 |
$50,020,000 |
| 10283379 |
Batch LED heating and cooling chamber or loadlock |
Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik |
2019-05-07 |
$13,988,000 |
| 10256125 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2019-04-09 |
$19,096,000 |
| 10249525 |
Dynamic leveling process heater lift |
Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, Gregory John Freeman, Robert Brent Vopat |
2019-04-02 |
$31,503,000 |
| 10186449 |
Apparatus and methods for wafer rotation to improve spatial ALD process uniformity |
Joseph Yudovsky, Jeffrey Blahnik |
2019-01-22 |
$28,931,000 |
| 10103046 |
Buffer chamber wafer heating mechanism and supporting robot |
Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande |
2018-10-16 |
$21,789,000 |
| 9899242 |
Device and method for substrate heating during transport |
Jason M. Schaller, Morgan Evans, Ala Moradian, Robert Brent Vopat, David Blahnik |
2018-02-20 |
|
| 9728430 |
Electrostatic chuck with LED heating |
Jason M. Schaller, Morgan Evans, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more |
2017-08-08 |
|
| 9722129 |
Complementary traveling masks |
Nicholas P. T. Bateman, Benjamin Riordan |
2017-08-01 |
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