Issued Patents All Time
Showing 25 most recent of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315748 | Workpiece handling architecture for high workpiece throughput | Jason M. Schaller, Michael Mason Carrell, Charles T. Carlson | 2025-05-27 |
| 12315747 | Workpiece handling architecture for high workpiece throughput | Jason M. Schaller, Michael Mason Carrell, Charles T. Carlson | 2025-05-27 |
| 12002649 | Spinning disk with electrostatic clamped platens for ion implantation | Robert J. Mitchell, Frank Sinclair, Joseph C. Olson, Nick Parisi | 2024-06-04 |
| 11894251 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more | 2024-02-06 |
| 11817332 | Multi-wafer volume single transfer chamber facet | Andrew J. Constant, Shay Assaf, Jacob Newman | 2023-11-14 |
| 11315806 | Batch heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik | 2022-04-26 |
| 11264258 | Buffer chamber wafer heating mechanism and supporting robots | Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2022-03-01 |
| 11232965 | Transport system | Jacob Newman, Ulrich Oldendorf, Martin Aenis, Andrew J. Constant, Shay Assaf +2 more | 2022-01-25 |
| 10854491 | Dynamic leveling process heater lift | Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, Gregory John Freeman, Robert Brent Vopat | 2020-12-01 |
| 10818525 | Ambient controlled transfer module and process system | Shay Assaf, Andrew J. Constant, Jacob Newman, Charles T. Carlson, Stephen C. Hickerson | 2020-10-27 |
| 10699930 | Buffer chamber wafer heating mechanism and supporting robots | Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2020-06-30 |
| 10597779 | Susceptor position and rational apparatus and methods of use | Robert Brent Vopat, Joseph Yudovsky, Jason M. Schaller | 2020-03-24 |
| 10586720 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2020-03-10 |
| 10443934 | Substrate handling and heating system | Morgan Evans, Jason M. Schaller, D. Jeffrey Lischer, Ala Moradian, Robert Brent Vopat | 2019-10-15 |
| 10446710 | Transfer chamber and method of using a transfer chamber | Aaron P. Webb, Charles T. Carlson, Paul Forderhase, Robert Brent Vopat | 2019-10-15 |
| 10427303 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing | Malcolm N. Daniel, JR., Robert Brent Vopat, Jason M. Schaller, Jacob Newman, Dinesh Kanawade +4 more | 2019-10-01 |
| 10361104 | Ambient controlled transfer module and process system | Shay Assaf, Andrew J. Constant, Jacob Newman, Charles T. Carlson, Stephen C. Hickerson | 2019-07-23 |
| 10283379 | Batch LED heating and cooling chamber or loadlock | Jason M. Schaller, Robert Brent Vopat, Paul E. Pergande, Benjamin B. Riordon, David Blahnik | 2019-05-07 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10249525 | Dynamic leveling process heater lift | Jason M. Schaller, Michael Paul Rohrer, Tuan Nguyen, Gregory John Freeman, Robert Brent Vopat | 2019-04-02 |
| 10186449 | Apparatus and methods for wafer rotation to improve spatial ALD process uniformity | Joseph Yudovsky, Jeffrey Blahnik | 2019-01-22 |
| 10103046 | Buffer chamber wafer heating mechanism and supporting robot | Jason M. Schaller, Robert Brent Vopat, David Blahnik, Benjamin B. Riordon, Paul E. Pergande | 2018-10-16 |
| 9899242 | Device and method for substrate heating during transport | Jason M. Schaller, Morgan Evans, Ala Moradian, Robert Brent Vopat, David Blahnik | 2018-02-20 |
| 9728430 | Electrostatic chuck with LED heating | Jason M. Schaller, Morgan Evans, Robert Brent Vopat, Paul E. Pergande, Julian G. Blake +2 more | 2017-08-08 |
| 9722129 | Complementary traveling masks | Nicholas P. T. Bateman, Benjamin Riordan | 2017-08-01 |