Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spinning disk with electrostatic clamped platens for ion implantation

Spinning disk with electrostatic clamped platens for ion implantation

US Patent 12002649 · Granted Jun 4, 2024

Estimated economic value: $68,807,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Shadow mask apparatus and methods for variable etch depths2025
Workpiece handling architecture for high workpiece throughput2025
Workpiece handling architecture for high workpiece throughput2025
Particle accelerator having novel electrode configuration for quadrupole focusin2025
Model-based controlled load lock pumping scheme2025
Linear accelerator assembly including flexible high-voltage connection2025
Single-slot tubular cathode2024
Resonator, linear accelerator configuration and ion implantation system having r2024
Cyclotron having continuously variable energy output2024
Cyclotron having continuously variable energy output2024
Modulation of rolling k vectors of angled gratings2024
Scanned angled etching apparatus and techniques providing separate co-linear rad2024