| 12002649 |
Spinning disk with electrostatic clamped platens for ion implantation |
Frank Sinclair, Joseph C. Olson, William T. Weaver, Nick Parisi |
2024-06-04 |
$68,807,000 |
| 11670532 |
System and method for controlling electrostatic clamping of multiple platens on a spinning disk |
Scott E. Peitzsch |
2023-06-06 |
$40,761,000 |
| 11217433 |
Rotary union with mechanical seal assembly |
Guillermo Colom |
2022-01-04 |
$136,975,000 |
| 11149345 |
Cryogenically cooled rotatable electrostatic chuck |
Shardul S. Patel |
2021-10-19 |
$109,516,000 |
| 10971327 |
Cryogenic heat transfer system |
— |
2021-04-06 |
$63,491,000 |
| 10832926 |
High throughput serial wafer handling end station |
Joseph Ferrara |
2020-11-10 |
$10,801,000 |
| 10586720 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat +1 more |
2020-03-10 |
$33,694,000 |
| 10453237 |
Automatic viewport releveling |
— |
2019-10-22 |
$3,154,000 |
| 10289701 |
Selectively caching sequential data items |
— |
2019-05-14 |
|
| 10256125 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat +1 more |
2019-04-09 |
$19,096,000 |
| 9378994 |
Multi-position batch load lock apparatus and systems and methods including same |
William T. Weaver, Joseph Yudovsky, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat +1 more |
2016-06-28 |
$9,817,000 |
| 8915136 |
Determination of pipe internal cross-sectional area |
Anthony G. Razzell |
2014-12-23 |
|
| 8869638 |
Inspection of pipe interior |
Anthony G. Razzell |
2014-10-28 |
|
| 8858874 |
Ternary nickel eutectic alloy |
Sammy Tin |
2014-10-14 |
|
| 8703045 |
Method of manufacturing a multiple composition component |
Catherine M. F. Rae, Mark C. HARDY, Shaun R. Holmes |
2014-04-22 |
|
| 8323424 |
Alloy component including a fine grain structure, a coarse grain structure and a transitional structure |
David Ulrich Furrer, Joseph A. Lemsky, Mark C. HARDY |
2012-12-04 |
|
| 8083872 |
Method of heat treating a superalloy component and an alloy component |
David Ulrich Furrer, Joseph A. Lemsky, Mark C. HARDY |
2011-12-27 |
|
| 7949425 |
High throughput wafer notch aligner |
Joseph Ferrara |
2011-05-24 |
$1,599,000 |
| 7897944 |
Method and apparatus for measurement of beam angle in ion implantation |
Bo H. Vanderberg |
2011-03-01 |
$4,914,000 |
| 7872247 |
Ion beam guide tube |
Geoffrey Ryding, Gregory Robert Alcott, Lee Spraggon, Martin A. Hilkene, Matthew Castle +1 more |
2011-01-18 |
$15,285,000 |
| 7560705 |
Workpiece handling scan arm for ion implantation system |
Ari Eiriksson, Donovan Beckel, Michel Pharand, Marvin R. LaFontaine, Ashwin M. Purohit +4 more |
2009-07-14 |
$1,944,000 |
| 7010388 |
Work-piece treatment system having load lock and buffer |
Allan D. Weed, Richard Gueler |
2006-03-07 |
$7,951,000 |
| 6903349 |
Ion implanter and a method of implanting ions |
John Gordon, Keith Relleen, Ronald Horner, Theodore H. Smick |
2005-06-07 |
$26,348,000 |
| 6900444 |
Adjustable implantation angle workpiece support structure for an ion beam implanter |
Joseph Ferrara |
2005-05-31 |
$8,330,000 |
| 6794664 |
Umbilical cord facilities connection for an ion beam implanter |
Kevin T. Ryan |
2004-09-21 |
$10,482,000 |
