Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9558980 | Vapor compression refrigeration chuck for ion implanters | William Davis Lee, Marvin R. LaFontaine | 2017-01-31 |
| 9281227 | Multi-resistivity Johnsen-Rahbek electrostatic clamp | William D. Lee | 2016-03-08 |
| 9048276 | Matched coefficient of thermal expansion for an electrostatic chuck | William D. Lee | 2015-06-02 |
| 9036326 | Gas bearing electrostatic chuck | William D. Lee, Marvin R. LaFontaine, Joseph Gillespie, Donovan Beckel, Teng-Chao David Tao +2 more | 2015-05-19 |
| 8941968 | Heated electrostatic chuck including mechanical clamp capability at high temperature | Perry J. I. Justesen, Allan D. Weed, William Davis Lee, Robert D. Rathmell, Gary Cook | 2015-01-27 |
| 8902560 | Electrostatic chuck ground punch | David B. Smith, William D. Lee, Marvin R. LaFontaine | 2014-12-02 |
| 8797706 | Heated annulus chuck | William Davis Lee, Gary Cook, Perry J. I. Justesen, Robert D. Rathmell, Allan D. Weed | 2014-08-05 |
| 8422193 | Annulus clamping and backside gas cooled electrostatic chuck | Teng-Chao David Tao, William D. Lee, Marvin R. LaFontaine | 2013-04-16 |
| 8270142 | De-clamping wafers from an electrostatic chuck | William D. Lee, Marvin R. LaFontaine, Richard J. Rzeszut | 2012-09-18 |
| 8241425 | Non-condensing thermos chuck | William D. Lee, Marvin R. LaFontaine | 2012-08-14 |
| 8228658 | Variable frequency electrostatic clamping | — | 2012-07-24 |
| 8023247 | Electrostatic chuck with compliant coat | Marvin R. LaFontaine, William D. Lee, Richard J. Rzeszut | 2011-09-20 |
| 7952851 | Wafer grounding method for electrostatic clamps | Marvin R. LaFontaine, Ari Eiriksson, William D. Lee | 2011-05-31 |
| 7751172 | Sliding wafer release gripper/wafer peeling gripper | Dale K. Stone, Dave Broyer, Steve Drummond | 2010-07-06 |
| 7560705 | Workpiece handling scan arm for ion implantation system | Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine +4 more | 2009-07-14 |
| 7385799 | Offset phase operation on a multiphase AC electrostatic clamp | — | 2008-06-10 |