Ashwin M. Purohit — 16 Patents at Axcelis Technologies

Ashwin M. Purohit has been granted 16 US patents while listed as an inventor at Axcelis Technologies. The first was granted in 2008 and the most recent in January 2017. Ashwin M. Purohit ranks #284,196 of 4,157,543 US inventors in our database (top 6.8%). Patent records list Ashwin M. Purohit in Gloucester, MA, US.

Issued Patents All Time

Showing 1–16 of 16 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
9558980	Vapor compression refrigeration chuck for ion implanters	William Davis Lee, Marvin R. LaFontaine	2017-01-31	$2,309,000
9281227	Multi-resistivity Johnsen-Rahbek electrostatic clamp	William D. Lee	2016-03-08	$3,734,000
9048276	Matched coefficient of thermal expansion for an electrostatic chuck	William D. Lee	2015-06-02	$3,024,000
9036326	Gas bearing electrostatic chuck	William D. Lee, Marvin R. LaFontaine, Joseph Gillespie, Donovan Beckel, Teng-Chao David Tao +2 more	2015-05-19	$3,094,000
8941968	Heated electrostatic chuck including mechanical clamp capability at high temperature	Perry J. I. Justesen, Allan D. Weed, William Davis Lee, Robert D. Rathmell, Gary Cook	2015-01-27	$2,568,000
8902560	Electrostatic chuck ground punch	David B. Smith, William D. Lee, Marvin R. LaFontaine	2014-12-02	$2,303,000
8797706	Heated annulus chuck	William Davis Lee, Gary Cook, Perry J. I. Justesen, Robert D. Rathmell, Allan D. Weed	2014-08-05	$1,890,000
8422193	Annulus clamping and backside gas cooled electrostatic chuck	Teng-Chao David Tao, William D. Lee, Marvin R. LaFontaine	2013-04-16	$745,000
8270142	De-clamping wafers from an electrostatic chuck	William D. Lee, Marvin R. LaFontaine, Richard J. Rzeszut	2012-09-18	$758,000
8241425	Non-condensing thermos chuck	William D. Lee, Marvin R. LaFontaine	2012-08-14	$749,000
8228658	Variable frequency electrostatic clamping	—	2012-07-24	$315,000
8023247	Electrostatic chuck with compliant coat	Marvin R. LaFontaine, William D. Lee, Richard J. Rzeszut	2011-09-20	$2,264,000
7952851	Wafer grounding method for electrostatic clamps	Marvin R. LaFontaine, Ari Eiriksson, William D. Lee	2011-05-31	$3,468,000
7751172	Sliding wafer release gripper/wafer peeling gripper	Dale K. Stone, Dave Broyer, Steve Drummond	2010-07-06	$796,000
7560705	Workpiece handling scan arm for ion implantation system	Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine +4 more	2009-07-14	$1,944,000
7385799	Offset phase operation on a multiphase AC electrostatic clamp	—	2008-06-10	$6,827,000

Ashwin M. Purohit — 16 Patents

Issued Patents All Time

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