| 9558980 |
Vapor compression refrigeration chuck for ion implanters |
William Davis Lee, Marvin R. LaFontaine |
2017-01-31 |
| 9281227 |
Multi-resistivity Johnsen-Rahbek electrostatic clamp |
William D. Lee |
2016-03-08 |
| 9048276 |
Matched coefficient of thermal expansion for an electrostatic chuck |
William D. Lee |
2015-06-02 |
| 9036326 |
Gas bearing electrostatic chuck |
William D. Lee, Marvin R. LaFontaine, Joseph Gillespie, Donovan Beckel, Teng-Chao David Tao +2 more |
2015-05-19 |
| 8941968 |
Heated electrostatic chuck including mechanical clamp capability at high temperature |
Perry J. I. Justesen, Allan D. Weed, William Davis Lee, Robert D. Rathmell, Gary Cook |
2015-01-27 |
| 8902560 |
Electrostatic chuck ground punch |
David B. Smith, William D. Lee, Marvin R. LaFontaine |
2014-12-02 |
| 8797706 |
Heated annulus chuck |
William Davis Lee, Gary Cook, Perry J. I. Justesen, Robert D. Rathmell, Allan D. Weed |
2014-08-05 |
| 8422193 |
Annulus clamping and backside gas cooled electrostatic chuck |
Teng-Chao David Tao, William D. Lee, Marvin R. LaFontaine |
2013-04-16 |
| 8270142 |
De-clamping wafers from an electrostatic chuck |
William D. Lee, Marvin R. LaFontaine, Richard J. Rzeszut |
2012-09-18 |
| 8241425 |
Non-condensing thermos chuck |
William D. Lee, Marvin R. LaFontaine |
2012-08-14 |
| 8228658 |
Variable frequency electrostatic clamping |
— |
2012-07-24 |
| 8023247 |
Electrostatic chuck with compliant coat |
Marvin R. LaFontaine, William D. Lee, Richard J. Rzeszut |
2011-09-20 |
| 7952851 |
Wafer grounding method for electrostatic clamps |
Marvin R. LaFontaine, Ari Eiriksson, William D. Lee |
2011-05-31 |
| 7751172 |
Sliding wafer release gripper/wafer peeling gripper |
Dale K. Stone, Dave Broyer, Steve Drummond |
2010-07-06 |
| 7560705 |
Workpiece handling scan arm for ion implantation system |
Ari Eiriksson, Donovan Beckel, Robert J. Mitchell, Michel Pharand, Marvin R. LaFontaine +4 more |
2009-07-14 |
| 7385799 |
Offset phase operation on a multiphase AC electrostatic clamp |
— |
2008-06-10 |