Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711324 | Inert atmospheric pressure pre-chill and post-heat | William Davis Lee | 2017-07-18 |
| 9611540 | Electrostatic chuck shielding mechanism | Kan Ota, Stanley W. Stone | 2017-04-04 |
| 8692215 | Heated rotary seal and bearing for chilled ion implantation system | William Davis Lee, William F. DiVergilio | 2014-04-08 |
| 7751172 | Sliding wafer release gripper/wafer peeling gripper | Ashwin M. Purohit, Dale K. Stone, Dave Broyer | 2010-07-06 |