SD

Steve Drummond

AT Axcelis Technologies: 4 patents #61 of 300Top 25%
Overall (All Time): #1,193,749 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9711324 Inert atmospheric pressure pre-chill and post-heat William Davis Lee 2017-07-18
9611540 Electrostatic chuck shielding mechanism Kan Ota, Stanley W. Stone 2017-04-04
8692215 Heated rotary seal and bearing for chilled ion implantation system William Davis Lee, William F. DiVergilio 2014-04-08
7751172 Sliding wafer release gripper/wafer peeling gripper Ashwin M. Purohit, Dale K. Stone, Dave Broyer 2010-07-06