Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842752 | Optical heat source with restricted wavelengths for process heating | David Bernhardt, W. Davis Lee, Marvin Farley | 2017-12-12 |
| 9653253 | Plasma-based material modification using a plasma source with magnetic confinement | Stephen E. Savas, Susan Felch, Tienyu Sheng, Hao Chen | 2017-05-16 |
| 8932430 | RF coupled plasma abatement system comprising an integrated power oscillator | Aseem K. Srivastava | 2015-01-13 |
| 8803110 | Methods for beam current modulation by ion source parameter modulation | Michael Graf, Edward C. Eisner, Daniel R. Tieger | 2014-08-12 |
| 8760054 | Microwave plasma electron flood | Bo H. Vanderberg | 2014-06-24 |
| 8692215 | Heated rotary seal and bearing for chilled ion implantation system | William Davis Lee, Steve Drummond | 2014-04-08 |
| 8237135 | Enhanced low energy ion beam transport in ion implantation | Bo H. Vanderberg | 2012-08-07 |
| 8193513 | Hybrid ion source/multimode ion source | Daniel R. Tieger, Michael Graf | 2012-06-05 |
| 8089052 | Ion source with adjustable aperture | Daniel R. Tieger, Edward C. Eisner, Michael Graf | 2012-01-03 |
| 7947966 | Double plasma ion source | — | 2011-05-24 |
| 7845310 | Wide area radio frequency plasma apparatus for processing multiple substrates | Aseem K. Srivastava | 2010-12-07 |
| 7800083 | Plasma electron flood for ion beam implanter | Bo H. Vanderberg | 2010-09-21 |
| 7750314 | Elevated temperature RF ion source | — | 2010-07-06 |
| 7748344 | Segmented resonant antenna for radio frequency inductively coupled plasmas | Victor M. Benveniste, Peter L. Kellerman | 2010-07-06 |
| 7589333 | Methods for rapidly switching off an ion beam | Michael Graf, Edward C. Eisner, Daniel R. Tieger | 2009-09-15 |
| 7531819 | Fluorine based cleaning of an ion source | Daniel R. Tieger, William P. Reynolds, Christopher W. Hodgdon, Sean Joyce | 2009-05-12 |
| 7453074 | Ion implanter with ionization chamber electrode design | Edward C. Eisner | 2008-11-18 |
| 7078707 | Ion beam scanning control methods and systems for ion implantation uniformity | Victor M. Benveniste, Peter L. Kellerman | 2006-07-18 |
| 6949895 | Unipolar electrostatic quadrupole lens and switching methods for charged beam transport | Youngzhang Huang | 2005-09-27 |
| 6947274 | Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage | Peter L. Kellerman, Shu Qin | 2005-09-20 |
| 6879109 | Thin magnetron structures for plasma generation in ion implantation systems | Victor M. Benveniste, Bo H. Vanderberg | 2005-04-12 |
| 6759665 | Method and system for ion beam containment in an ion beam guide | Victor M. Benveniste, John Zheng Ye | 2004-07-06 |
| 6664548 | Ion source and coaxial inductive coupler for ion implantation system | Victor M. Benveniste | 2003-12-16 |
| 6653643 | Method and apparatus for improved ion acceleration in an ion implantation system | Kourosh Saadatmand | 2003-11-25 |
| 6653803 | Integrated resonator and amplifier system | Kourosh Saadatmand, Ernst F. Scherer | 2003-11-25 |