Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10177050 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, David H. Quach, Sean S. Kang | 2019-01-08 |
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, David H. Quach, Sean S. Kang | 2016-08-09 |
| 7701230 | Method and system for ion beam profiling | Michael Cristoforo, Yongzhang Huang, Michael Graf, Bo H. Vanderberg | 2010-04-20 |
| 7557363 | Closed loop dose control for ion implantation | Yongzhang Huang, Brian S. Freer, Christopher Godfrey, Michael Graf, Patrick Splinter | 2009-07-07 |
| 7507977 | System and method of ion beam control in response to a beam glitch | Que Weiguo, Yongzhang Huang, David Tao, Patrick Splinter | 2009-03-24 |
| 6759665 | Method and system for ion beam containment in an ion beam guide | Victor M. Benveniste, William F. DiVergilio | 2004-07-06 |
| 6703628 | Method and system for ion beam containment in an ion beam guide | Victor M. Benveniste, Michael Cristoforo | 2004-03-09 |
| 6541781 | Waveguide for microwave excitation of plasma in an ion beam guide | Victor M. Benveniste, William F. DiVergilio | 2003-04-01 |
| 6525326 | System and method for removing particles entrained in an ion beam | Eric R. Harrington, Victor M. Benveniste, Jeffrey A. Burgess | 2003-02-25 |