Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153127 | Low profile extraction electrode assembly | — | 2018-12-11 |
| 9818575 | Low profile extraction electrode assembly | — | 2017-11-14 |
| 7559557 | Sealing between vacuum chambers | Gregory Thronson | 2009-07-14 |
| 6984831 | Gas flow restricting cathode system for ion implanter and related method | Russell J. Low, Joseph C. Olson, Curt D. Bergeron, Eric R. Cobb | 2006-01-10 |
| 6525326 | System and method for removing particles entrained in an ion beam | Eric R. Harrington, Victor M. Benveniste, John Zheng Ye | 2003-02-25 |