Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7138768 | Indirectly heated cathode ion source | Peter E. Maciejowski, Joseph C. Olson, Shengwu Chang, Bjorn O. Pedersen, Leo V. Klos +1 more | 2006-11-21 |
| 6984831 | Gas flow restricting cathode system for ion implanter and related method | Russell J. Low, Joseph C. Olson, Eric R. Cobb, Jeffrey A. Burgess | 2006-01-10 |