Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9076625 | Indirectly heated cathode cartridge design | Craig R. Chaney, Anthony Renau, Alexander S. Perel | 2015-07-07 |
| 8455839 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Alexander S. Perel, Neil J. Bassom | 2013-06-04 |
| 8071956 | Cleaning of an extraction aperture of an ion source | Craig R. Chaney, Alexander S. Perel | 2011-12-06 |
| 8049192 | Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter | Neil J. Bassom, Joseph C. Olson | 2011-11-01 |
| 7491947 | Technique for improving performance and extending lifetime of indirectly heated cathode ion source | Eric R. Cobb, Russell J. Low, Craig R. Chaney | 2009-02-17 |
| 7276847 | Cathode assembly for indirectly heated cathode ion source | Joseph C. Olson, Anthony Renau, Nicholas A. Venuto | 2007-10-02 |
| 7138768 | Indirectly heated cathode ion source | Peter E. Maciejowski, Joseph C. Olson, Shengwu Chang, Bjorn O. Pedersen, Daniel Distaso +1 more | 2006-11-21 |
| 7102139 | Source arc chamber for ion implanter having repeller electrode mounted to external insulator | Russell J. Low, Eric R. Cobb, Joseph C. Olson | 2006-09-05 |
| 6448567 | Method and apparatus for shielding a valve gate and other valve parts | James Botelho | 2002-09-10 |
| 6403972 | Methods and apparatus for alignment of ion beam systems using beam current sensors | Antonella Cucchetti, Joseph C. Olson, Raymond L. Pelletier, Keith Pierce, Anthony Renau +1 more | 2002-06-11 |
| 5629528 | Charged particle beam system having beam-defining slit formed by rotating cyclinders | Jonathan A. Jost, Michael E. Mack | 1997-05-13 |
| 4931776 | Fluid flow sensor with flexible vane | Richard J. Hertel | 1990-06-05 |
| 4744709 | Low deflection force sensitive pick | Richard J. Hertel | 1988-05-17 |
| 4602713 | Multiple wafer holder for a wafer transfer system | Richard J. Hertel | 1986-07-29 |