Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5629528 | Charged particle beam system having beam-defining slit formed by rotating cyclinders | Leo V. Klos, Michael E. Mack | 1997-05-13 |
| 4527620 | Apparatus for controlling thermal transfer in a cyclic vacuum processing system | Bjorn O. Pedersen | 1985-07-09 |