Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7696495 | Method and device for adjusting a beam property in a gas cluster ion beam system | Yan Shao | 2010-04-13 |
| 7377228 | System for and method of gas cluster ion beam processing | — | 2008-05-27 |
| 7173252 | Ionizer and method for gas-cluster ion-beam formation | — | 2007-02-06 |
| 7060988 | Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system | Robert K. Becker, Matthew C. Gwinn | 2006-06-13 |
| 7060989 | Method and apparatus for improved processing with a gas-cluster ion beam | David Swenson, John Hautala, Martin D. Tabat, Matthew C. Gwinn | 2006-06-13 |
| 6831272 | Gas cluster ion beam size diagnostics and workpiece processing | Richard Torti | 2004-12-14 |
| 6646277 | Charging control and dosimetry system for gas cluster ion beam | Bruce K. Libby | 2003-11-11 |
| 6222196 | Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter | — | 2001-04-24 |
| 5959305 | Method and apparatus for monitoring charge neutralization operation | Michel Pharand, Paul Lustiber, David J. Fish | 1999-09-28 |
| 5757018 | Zero deflection magnetically-suppressed Faraday for ion implanters | Ronald F. Holsinger | 1998-05-26 |
| 5629528 | Charged particle beam system having beam-defining slit formed by rotating cyclinders | Jonathan A. Jost, Leo V. Klos | 1997-05-13 |
| 5240046 | Fluid flow control method and apparatus for minimizing particle contamination | — | 1993-08-31 |
| 5031674 | Fluid flow control method and apparatus for minimizing particle contamination | — | 1991-07-16 |
| 4987933 | Fluid flow control method and apparatus for minimizing particle contamination | — | 1991-01-29 |
| 4669085 | Electro-optical modulator for an electro-optically modulated laser | Bertrand E. Plourde | 1987-05-26 |
| 4289397 | Laser ceilometer signal processing means | Irving Itzkan, Herbert P. Kent, Richard G. Morton | 1981-09-15 |