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Method and device for adjusting a beam property in a gas cluster ion beam system |
Yan Shao |
2010-04-13 |
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System for and method of gas cluster ion beam processing |
— |
2008-05-27 |
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Ionizer and method for gas-cluster ion-beam formation |
— |
2007-02-06 |
| 7060988 |
Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system |
Robert K. Becker, Matthew C. Gwinn |
2006-06-13 |
| 7060989 |
Method and apparatus for improved processing with a gas-cluster ion beam |
David Swenson, John Hautala, Martin D. Tabat, Matthew C. Gwinn |
2006-06-13 |
| 6831272 |
Gas cluster ion beam size diagnostics and workpiece processing |
Richard Torti |
2004-12-14 |
| 6646277 |
Charging control and dosimetry system for gas cluster ion beam |
Bruce K. Libby |
2003-11-11 |
| 6222196 |
Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter |
— |
2001-04-24 |
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Method and apparatus for monitoring charge neutralization operation |
Michel Pharand, Paul Lustiber, David J. Fish |
1999-09-28 |
| 5757018 |
Zero deflection magnetically-suppressed Faraday for ion implanters |
Ronald F. Holsinger |
1998-05-26 |
| 5629528 |
Charged particle beam system having beam-defining slit formed by rotating cyclinders |
Jonathan A. Jost, Leo V. Klos |
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Fluid flow control method and apparatus for minimizing particle contamination |
— |
1993-08-31 |
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Fluid flow control method and apparatus for minimizing particle contamination |
— |
1991-07-16 |
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Fluid flow control method and apparatus for minimizing particle contamination |
— |
1991-01-29 |
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Electro-optical modulator for an electro-optically modulated laser |
Bertrand E. Plourde |
1987-05-26 |
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Laser ceilometer signal processing means |
Irving Itzkan, Herbert P. Kent, Richard G. Morton |
1981-09-15 |