Michael E. Mack — 16 Patents at Epion

Michael E. Mack has been granted 16 US patents while listed as an inventor at Epion. The first was granted in 1981 and the most recent in April 2010. Michael E. Mack ranks #284,196 of 4,157,543 US inventors in our database (top 6.8%). Patent records list Michael E. Mack in Attleboro, MA, US.

Issued Patents All Time

Showing 1–16 of 16 patents

Patent #	Title	Co-Inventors	Date	Approx Value ⓘ
7696495	Method and device for adjusting a beam property in a gas cluster ion beam system	Yan Shao	2010-04-13
7377228	System for and method of gas cluster ion beam processing	—	2008-05-27
7173252	Ionizer and method for gas-cluster ion-beam formation	—	2007-02-06
7060988	Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system	Robert K. Becker, Matthew C. Gwinn	2006-06-13
7060989	Method and apparatus for improved processing with a gas-cluster ion beam	David Swenson, John Hautala, Martin D. Tabat, Matthew C. Gwinn	2006-06-13
6831272	Gas cluster ion beam size diagnostics and workpiece processing	Richard Torti	2004-12-14
6646277	Charging control and dosimetry system for gas cluster ion beam	Bruce K. Libby	2003-11-11
6222196	Rotatable workpiece support including cyclindrical workpiece support surfaces for an ion beam implanter	—	2001-04-24	$16,281,000
5959305	Method and apparatus for monitoring charge neutralization operation	Michel Pharand, Paul Lustiber, David J. Fish	1999-09-28	$6,007,000
5757018	Zero deflection magnetically-suppressed Faraday for ion implanters	Ronald F. Holsinger	1998-05-26	$7,151,000
5629528	Charged particle beam system having beam-defining slit formed by rotating cyclinders	Jonathan A. Jost, Leo V. Klos	1997-05-13	$9,462,000
5240046	Fluid flow control method and apparatus for minimizing particle contamination	—	1993-08-31	$7,380,000
5031674	Fluid flow control method and apparatus for minimizing particle contamination	—	1991-07-16	$2,979,000
4987933	Fluid flow control method and apparatus for minimizing particle contamination	—	1991-01-29	$1,934,000
4669085	Electro-optical modulator for an electro-optically modulated laser	Bertrand E. Plourde	1987-05-26
4289397	Laser ceilometer signal processing means	Irving Itzkan, Herbert P. Kent, Richard G. Morton	1981-09-15	$3,309,000

Michael E. Mack — 16 Patents

Issued Patents All Time

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