Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334348 | Substrate scanning apparatus with pendulum and rotatable substrate holder | Kevin L. Siefering, Michael Gruenhagen | 2025-06-17 |
| 11915906 | Wafer scanning apparatus and method for focused beam processing | Paul Consoli, Jerry Negrotti | 2024-02-27 |
| 11715620 | Tuning gas cluster ion beam systems | Martin D. Tabat, Kenneth Regan | 2023-08-01 |
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Luis Fernandez +3 more | 2023-07-04 |
| 11587760 | Wafer scanning apparatus and method for focused beam processing | Paul Consoli, Jerry Negrotti | 2023-02-21 |
| 11450506 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Luis Fernandez +3 more | 2022-09-20 |
| 10861674 | Compensated location specific processing apparatus and method | Martin D. Tabat, Kenneth Regan, Allen J. Leith, Michael Graf | 2020-12-08 |
| 10497540 | Compensated location specific processing apparatus and method | Martin D. Tabat, Kenneth Regan, Allen J. Leith, Michael Graf | 2019-12-03 |
| 9735019 | Process gas enhancement for beam treatment of a substrate | Michael Graf, Noel Russell, Allen J. Leith | 2017-08-15 |
| 9343259 | GCIB nozzle assembly | Avrum Freytsis, Robert K. Becker | 2016-05-17 |
| 9236221 | Molecular beam enhanced GCIB treatment | — | 2016-01-12 |
| 9029808 | Low contamination scanner for GCIB system | Avrum Freytsis, Jerry Negrotti, Robert K. Becker | 2015-05-12 |
| 8981322 | Multiple nozzle gas cluster ion beam system | Martin D. Tabat, Robert K. Becker, Avrum Freytsis, Michael Graf | 2015-03-17 |
| 8791430 | Scanner for GCIB system | Avrum Freytsis, Jay Wallace | 2014-07-29 |
| 8304033 | Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles | Martin D. Tabat, Robert K. Becker, Avrum Freytsis, Michael Graf | 2012-11-06 |
| 8097860 | Multiple nozzle gas cluster ion beam processing system and method of operating | Martin D. Tabat, Robert K. Becker, Avrum Freytsis, Michael Graf | 2012-01-17 |
| 7825389 | Method and apparatus for controlling a gas cluster ion beam formed from a gas mixture | John Hautala, Jerald P. Dykstra | 2010-11-02 |
| 7642531 | Apparatus and method for reducing particulate contamination in gas cluster ion beam processing equipment | Martin D. Tabat | 2010-01-05 |
| 7608843 | Method and apparatus for scanning a workpiece through an ion beam | Avrum Freytsis, Eric R. Harrington | 2009-10-27 |
| 7060989 | Method and apparatus for improved processing with a gas-cluster ion beam | David Swenson, John Hautala, Michael E. Mack, Martin D. Tabat | 2006-06-13 |
| 7060988 | Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system | Michael E. Mack, Robert K. Becker | 2006-06-13 |
| 6737643 | Detector and method for cluster ion beam diagnostics | Richard Torti, Jerald P. Dykstra | 2004-05-18 |
| 6486478 | Gas cluster ion beam smoother apparatus | Bruce K. Libby, Isao Yamada, James A. Greer, Lester G. Crawford, James G. Bachand +1 more | 2002-11-26 |
| 6294862 | Multi-cusp ion source | Adam Brailove | 2001-09-25 |
| 5962858 | Method of implanting low doses of ions into a substrate | — | 1999-10-05 |