| 9343259 |
GCIB nozzle assembly |
Matthew C. Gwinn, Robert K. Becker |
2016-05-17 |
| 9305746 |
Pre-aligned nozzle/skimmer |
Robert K. Becker |
2016-04-05 |
| 9029808 |
Low contamination scanner for GCIB system |
Matthew C. Gwinn, Jerry Negrotti, Robert K. Becker |
2015-05-12 |
| 8981322 |
Multiple nozzle gas cluster ion beam system |
Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Michael Graf |
2015-03-17 |
| 8791430 |
Scanner for GCIB system |
Matthew C. Gwinn, Jay Wallace |
2014-07-29 |
| 8304033 |
Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles |
Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Michael Graf |
2012-11-06 |
| 8097860 |
Multiple nozzle gas cluster ion beam processing system and method of operating |
Martin D. Tabat, Matthew C. Gwinn, Robert K. Becker, Michael Graf |
2012-01-17 |
| 7608843 |
Method and apparatus for scanning a workpiece through an ion beam |
Matthew C. Gwinn, Eric R. Harrington |
2009-10-27 |
| 6676989 |
Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology |
Allen R. Kirkpatrick, Robert K. Becker |
2004-01-13 |
| 5350427 |
Wafer retaining platen having peripheral clamp and wafer lifting means |
Richard J. Hertel |
1994-09-27 |
| 4965862 |
Disk scanning apparatus for batch ion implanters |
Judy E. Sedgewick |
1990-10-23 |
| 4899059 |
Disk scanning apparatus for batch ion implanters |
Richard J. Hertel, Eric L. Mears |
1990-02-06 |
| 4620738 |
Vacuum pick for semiconductor wafers |
Vladimir Schwartz |
1986-11-04 |