Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106943 | Substrate halo arrangement for improved process uniformity | Jay Wallace, Simon Ruffell, Kevin Anglin, Tyler Rockwell, Christopher Campbell +2 more | 2024-10-01 |
| 10600616 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +1 more | 2020-03-24 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Morgan Evans, Ernest E. Allen, Tyler Rockwell, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |
| 10224181 | Radio frequency extraction system for charge neutralized ion beam | Costel Biloiu, Piotr Lubicki, Tyler Rockwell, Christopher Campbell, Vikram Singh +3 more | 2019-03-05 |
| 10128082 | Apparatus and techniques to treat substrates using directional plasma and point of use chemistry | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell +1 more | 2018-11-13 |
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Kevin M. Daniels, Glen Gilchrist | 2018-08-28 |
| 10004133 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2018-06-19 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Ernest E. Allen, Alexander C. Kontos, Shurong Liang, Jeffrey E. Krampert +1 more | 2018-01-09 |
| 9706634 | Apparatus and techniques to treat substrates using directional plasma and reactive gas | Shurong Liang, Costel Biloiu, Glen F. R. Gilchrist, Vikram Singh, Christopher Campbell +3 more | 2017-07-11 |
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Vijayakumar C. Venugopal, Vikram Singh, Ernest E. Allen | 2017-03-07 |
| 9520264 | Method and apparatus for clamping and cooling a substrate for ion implantation | Jeffrey E. Krampert, John Robert Fairhurst | 2016-12-13 |
| 9218990 | Method and apparatus for holding a plurality of substrates for processing | John Robert Fairhurst, Jeffrey E. Krampert, Edward D. MacIntosh | 2015-12-22 |
| 9070730 | Method and apparatus for removing a vertically-oriented substrate from a cassette | John Robert Fairhurst, Jeffrey E. Krampert | 2015-06-30 |
| 8941082 | Dual sided workpiece handling | Ernest E. Allen, Philip J. McGrail, Jr. | 2015-01-27 |
| 8746666 | Media carrier | Julian G. Blake, Edward D. MacIntosh, Alexander C. Kontos, Frank Sinclair, Christopher A. Rowland +2 more | 2014-06-10 |
| 8585115 | Method and apparatus for lifting a horizontally-oriented substrate from a cassette | John Robert Fairhurst, Jeffrey E. Krampert, Richard S. Muka | 2013-11-19 |
| 8563407 | Dual sided workpiece handling | Ernest E. Allen, Philip J. McGrail, Jr. | 2013-10-22 |
| 8550520 | Method and apparatus for manipulating a substrate | John Robert Fairhurst, Jeffrey E. Krampert | 2013-10-08 |
| 7220055 | Air bearing having unitary housing | Jeffery E. Krampert | 2007-05-22 |
| 5751246 | Accountability and theft protection via the global positioning system | — | 1998-05-12 |
| 5532690 | Apparatus and method for monitoring and bounding the path of a ground vehicle | — | 1996-07-02 |
| 5453782 | Automatic exposure and gain control for low light level television camera | — | 1995-09-26 |
| 5350427 | Wafer retaining platen having peripheral clamp and wafer lifting means | Avrum Freytsis | 1994-09-27 |
| 5040484 | Apparatus for retaining wafers | Eric L. Mears, Robert V. Brick, Carl Holt | 1991-08-20 |
| 4931776 | Fluid flow sensor with flexible vane | Leo V. Klos | 1990-06-05 |