Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424112 | Transparent halo assembly for reduced particle generation | Costel Biloiu, Daniel McGillicuddy | 2022-08-23 |
| 10974276 | Hydrophobic shafts for use in process chambers | Jonathan D. Fischer, Jeffrey E. Krampert | 2021-04-13 |
| 10569299 | Hydrophobic shafts for use in process chambers | Jonathan D. Fischer, Jeffrey E. Krampert | 2020-02-25 |
| 10395969 | Transparent halo for reduced particle generation | Costel Biloiu, Frank Sinclair | 2019-08-27 |
| 10325752 | Performance extraction set | Adam Calkins | 2019-06-18 |
| 10276340 | Low particle capacitively coupled components for workpiece processing | Morgan Evans, Tyler Rockwell, Richard J. Hertel, Joseph F. Sommers, Christopher Campbell | 2019-04-30 |
| 10062548 | Gas injection system for ion beam device | Jay Wallace, Richard J. Hertel, Kevin M. Daniels, Glen Gilchrist | 2018-08-28 |
| 9865433 | Gas injection system for ion beam device | Jay Wallace, Richard J. Hertel, Alexander C. Kontos, Shurong Liang, Jeffrey E. Krampert +1 more | 2018-01-09 |
| 9589769 | Apparatus and method for efficient materials use during substrate processing | Vijayakumar C. Venugopal, Richard J. Hertel, Vikram Singh | 2017-03-07 |
| 9287085 | Processing apparatus and method of treating a substrate | Jon Ballou, Kevin M. Daniels, James P. Buonodono, Joseph P. Dzengeleski | 2016-03-15 |
| 8941082 | Dual sided workpiece handling | Richard J. Hertel, Philip J. McGrail, Jr. | 2015-01-27 |
| 8659229 | Plasma attenuation for uniformity control | Peter F. Kurunczi, Frank Sinclair, Costel Biloiu, Ludovic Godet | 2014-02-25 |
| 8563407 | Dual sided workpiece handling | Richard J. Hertel, Philip J. McGrail, Jr. | 2013-10-22 |
| 6429139 | Serial wafer handling mechanism | Kevin T. Ryan, Peter L. Kellerman, Frank Sinclair, Roger B. Fish | 2002-08-06 |
| 6347919 | Wafer processing chamber having separable upper and lower halves | Kevin T. Ryan, Peter L. Kellerman, Frank Sinclair, Roger B. Fish | 2002-02-19 |
| 6231054 | Elastomeric sliding seal for vacuum bellows | Robert J. Mitchell, Perry J. I. Justesen, Alexander F. Pless | 2001-05-15 |
| 6065499 | Lateral stress relief mechanism for vacuum bellows | Alexander F. Pless, Gary J. Rosen, Allan D. Weed, Victor M. Benveniste, Perry J. I. Justesen | 2000-05-23 |